- Introduction
- Feedback
XD730.100 Piezo Objective Scanner is a Z-motion platform designed for large loads and 100-micron travel. Its travel range is up to 100μm and its carrying capacity is up to 0.5kg. It is very suitable for nano-scale objective motion control.
Characteristics
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Application
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| Technical Data | |||
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Type |
XD730.400S-B1 |
XD730.400K-B1 |
Units |
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Active axes |
Z |
Z |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
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Travel range(0~120V) |
80 |
80 |
μm±10% |
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Max.travel(0~150V) |
100 |
100 |
μm±10% |
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Sensor |
SGS |
- |
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Open loop resolution |
《<10 |
5 |
nm |
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Linearity |
0.12 |
- |
%F.S. |
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Repeatability
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0.03 |
- |
%F.S. |
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Unloaded resonant frequency |
310 |
310 |
Hz±20% |
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Unloaded step time |
30 |
2 |
ms±20% |
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El. capacitance |
6.8 |
6.8 |
μF±10% |
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Load capacity |
0.5 |
0.5 |
kg |
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Material |
Al, Steel |
Al, Steel |
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Mass |
190 |
190 |
g±5% |
Note: Above parameters are measured with the E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For highreliability and long-term operation, the recommended driving voltage is 0~120V.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
