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Piezo Objective Scanner
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    Technical Data
 Type XD701.150S/K Units
 Active axes Z
 Drive control 1 driving channel 1 sensing channel
 Sensor SGS/CAP
 Travel range(0~150V) 150 μm±20%
 Resolution(5mV) 2/5 nm±20%
 Aperture Ø25~Ø50 mm
 Load capacity 2 kg
 Unloaded resonant frequency 400 Hz±20% 
 Resonant frequency @2kg 3.6 Hz±20%
 Mass(with no cable) 1.8 kg±5%
 El. capacitance 29 μF±20%
 Material Steel, Al
    Drawing (Click on the picture to enlarge it)
Click on the picture to enlarge it
    Technical Data
 Type 21062 Units
 Active axes Z
 Travel range(0~150V) 7 μm±20%
 Sensor SGS
 Aperture Φ10 mm
 Size Φ30×22 mm
 Closed/open loop resolution
0.5/0.2 nm±20%
 Closed-loop linearity 0.5 %F.S.±20%
 Repeatability 0.2 %F.S.±20%
 Stiffness 50 N/μm±20%
 Push/pull force 350/20 N
 Unloaded resonant frequency
6 KHz±20%
 Load capacity 500 g
 El. capacitance 0.8 μF±20%
 Material Steel
    Drawings(Click on the picture to enlarge it)
Click on the picture to enlarge it
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