P75 Piezo Objective ScannerCurrent Location:Product Homepage >> Piezo Objective Scanner>>P75 Piezo Objective Scanner
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      The P76F is a Z-direction piezo objective scanner with a maximum displacement of 90μm and a load capacity up to 900g, making it suitable for high load applications such as laser invisible cutting of wafer. The objective lens connector has various adapters thread to choose, and is customizable according to customer needs. It can be fixed through two different aperture through holes. It adopts flexible hinge mechanism, with no friction, good linearity and high positioning accuracy.


Characteristics


 Max. travel range to 250μm

 Load capacity to 0.2kg

 Unloaded resonant frequency to 389Hz

 Design of separated thread adapter


Frequency vs Load Curve

Recommended Controllers


Typical Applications


 3D imaging

 Interference/metering

Biotechnology

  Confocal microscope 

 Surface structure analysis

 Semiconductor test

 


    Technical Data

Type

S-Closed loop

P75.Z200S

P75.Z200K

Units

K-Open loop

  Active axes

Z

Z

 

  Drive control

1 driving channel 

1 sensing channel

1 driving channel

 

  Nominal travel range(0~120V)

200

200

µm±10%

  Max.travel range(0~150V)

250

250

µm±10%

  Integrated sensor

SGS

-

 

  Resolution

6

2.5

nm

  Linearity

0.125

-

%F.S.

  Repeatability

0.05

-

%F.S.

  Push/pull force

25/10

25/10

N

  Stiffness

0.1 0.1

N/μm±20%

  Unloaded resonant frequency

389

389

Hz±20%

  Closed-loop operating frequency (-3dB)

20

-

Hz±20%

  Step time

25

10

ms±20%

  Load capacity

0.2

0.2

kg

  El. capacitance

6.5

6.5

μF±20%

  Material

AI,Steel

AI,Steel

 

  Mass

225

225

g±5%

    Drawing (Click on the picture to enlarge it)
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    Downloads
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Step
Specs Sheet
Manual


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