- Introduction
- Feedback
The P76F is a Z-direction piezo objective scanner with a maximum displacement of 90μm and a load capacity up to 900g, making it suitable for high load applications such as laser invisible cutting of wafer. The objective lens connector has various adapters thread to choose, and is customizable according to customer needs. It can be fixed through two different aperture through holes. It adopts flexible hinge mechanism, with no friction, good linearity and high positioning accuracy.
Characteristics
|
|
|
|
|
|
Open/Closed Loop Curve 
|
Recommended Controllers 
|
Typical Applications
|
|
|
|
|
|
|
|
|
|
| Technical Data | ||||
|
Type |
S-Closed loop |
P76F.Z80S60-C |
P76F.Z80K60-C |
Units |
|
K-Open loop |
||||
|
Active axes |
Z |
Z |
|
|
|
Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
|
|
|
Nominal travel range(0~120V) |
72 |
72 |
µm±10% |
|
|
Max.travel range(0~150V) |
90 |
90 |
µm±10% |
|
|
Integrated sensor |
SGS |
- |
|
|
|
Resolution |
3 |
1 |
nm，typ. |
|
|
Closed-loop linearity |
0.2 |
- |
%F.S. |
|
|
Repeatability |
0.03 |
- |
%F.S. |
|
|
Pitch/yaw/roll |
＜20 |
＜20 |
μrad |
|
|
Unloaded resonant frequency |
750 |
750 |
Hz±20% |
|
|
Loaded resonant frequency@900g |
280 |
280 |
Hz±20% |
|
|
Step time |
10@900g |
3 |
ms±20% |
|
|
Load capacity |
0.9 |
0.9 |
Kg |
|
|
El. capacitance |
14.4 |
14.4 |
μF±20% |
|
|
Material |
AI,Steel |
AI,Steel |
|
|
|
Mass |
1740 |
1740 |
g±5% |
|
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
