Type

End with S - closed loop
End with K - open loop

H81A.XYZ20S

H81A.XYZ20K

Units

Active axes

X、Y、Z

X、Y、Z

Manual Adjustment - Micrometer

Travel range

4

4

mm±10%

Accuracy

500

500

μm/turn±10%

Fine Adjustment - Piezo

Travel range(0~150V)

18

18

μm±20%

Sensor

SGS

-

Resolution

1

0.2

nm

Linearity

0.3

-

%F.S.

Repeatability

0.2

-

%F.S.

Load capacity

1

1

kg

El.capacitance

1.8

1.8

μF/axis±20%

Material

Steel, Al

Steel, Al

Mass

1(Cable not included)

1(Cable not included)

kg±5%

Driving channels

3 driving channels , 3 sensing channels