XY axis XY65P84S/K Piezoelectric macro - micro composite platformCurrent Location:Product Homepage >> Millimeter Linear Stages>>XY axis XY65P84S/K Piezoelectric macro - micro composite platform
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Macro micro composite piezoelectric platform is to point to in the micrometer integration on the basis of the piezo positioning platform, hand the micrometer can be 13 mm stroke of macro regulation, piezoelectric movement platform can be 100or250 microns stroke of nanoscale micro adjustment, and micrometer adjustment accuracy on the platform of piezoelectric motor adjustment range, so as to ensure the precision of adjustment and convenient.


Characteristics


 X Y motion

 Custom longer coarse/fine travel is available

 Manual micrometer displacement to 13mm, resolution to 10μm

 Selectable sensor

 Piezo displacement up to 100µm, reslution to 1nm

 Piezo displacement up to 250µm, reslution to 2nm


Macro-Micro Composition


Macro-micro composition is to complete the large-scale precision positioning requirements through macro adjustment micrometer head and piezoelectric micro-motion adjustment mechanism.


Piezo driving

Manual adjustment

Macro-Micro Composition

1 Axes Large Displacement Linear Stage

2 Axes Large Displacement Linear Stage

3 Axes Large Displacement Linear Stage

Driving and Controlling


Applications


 Optical alignment

 Cell manipulation

 Precision positioning

 Micromachining/precision control

    Technical data
Type 
 S- Closed loop
 K- Open loop
XY65P84S/K XY65P84S/K250 Units
Active axes X, Y X, Y
Travel range(coarse+fine) 13+100/axis 13+250/axis mm+µm
Meterial Steel, Al Steel, Al
Manual Adjustment - Micrometer
Travel range 13/axis 13/axis mm
Resolution 10 10 µm 
Driving mode Screw thread pair
Sensitivity <2  <2  µm 
Least count 10 10 μm/div
Screw pitch 0.5 0.5 mm/rev. 
Piezo Adjustment - Piezo
Travel range  0~120 V 80/axis 200/axis  µm±20% 
Travel range 0~150 V 100/axis 250/axis  µm±20% 
Sensor SGS/- SGS/-
Min step (resolution) 3/1 7/2 nm, typ. 
Closed-loop linearity 0.1/- 0.1/- %F.S. 
Repeatability 0.05/- 0.05/- %F.S. 
Push force capacity 16 8 N 
Stiffness 1 0.03 N/µm±20% 
Load(Z axis) 1 1 kg 
Mass 800 1000 g±5%
E.I capacitance 1.8/axis 7.2/axis µF±20% 
Operating temperature[1] -20~80  -20~80  °C 
Cable[2] 1.5 1.5 m±10mm 
Connector[2] LEMO  LEMO 

Note: Max driving voltage could be -20V~150V, recommended voltage 0~120V for long-term and high-reliable operation to extend lifetime. Technical data is measured by CoreMorrow E00/E01 series piezo controller.

[1] Custom ultralow temperature and ultrahigh vacuum versions are available.

[2] Custom cable length and connector is available.

Note: The parameters mentioned above are related to the test environment and test equipment.

    Drawing (Click on the picture to enlarge it)
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    XY65P84S/K 250 Drawing (Click on the picture to enlarge it)
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    Downloads
Auto CAD PDF

XY65P84S/K

XY65P84S/K 250

Step


Specs Sheet
Manual


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