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N11 Linear Piezo Motor
  • Introduction
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The N11 series linear piezo motor adopts the principle of stick-slip and convert the micro -movement of PZT piezo actuator into a millimeter -level long travel. It is very small, only 15 × 15 × 7mm^3. However, its travel can be as high as 3.6mm, which is very suitable for adjustment and application of the millimeter range in the limited space.


Characteristics


 Travel to 3.6mm

 1 to 3 axes for choice

 • Speed up to 2mm/s

 Small size, light weight

 Self-locking at rest, requires no current


N11 vacuum version


Application


 Sample movement in super resolution imaging

 Micro -nano equipment and manufacturing 

 Integrated circuit manufacturing and testing

 Scanning electron microscopy (SEM) sample manipulation

 Large-scale electronic bundle direct writing (EBL)

 High vacuum sample high-precision alignment and tuning posture

 Nano -focus and scanning 

 Active optics

    Technical Data

Type

N11.X3.5K

Units

Active axes

X

 

Nominal travel range

3.6/±1.8

mm

Max speed

2

mm/s

Open loop resolution

20

nm

Max force

0.5

 N

Holding force(Passivity)

1.5

N

Max load (horizontal direction)

0.3

kg

Max load (vertical direction)

0.03

kg

Axial stiffness

1

N/μm±10%

Lateral stiffness

2

N/μm±10%

Operating temperature

0~50

°C

Cable length

1.5

m±10%

Material

Al, stainless steel


Mass (not include cable)

6

g±10%

Recommended controller

E53.C1K-J


    Drawing (Click on the picture to enlarge it)
Click on the picture to enlarge it
    Downloads
Auto CAD PDF
Step

N11.X3.5K

N11.XYZ3.5K

Specs Sheet
Manual

     3D diagram presentation
     3D diagram presentation

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