The N11 series linear piezo motor adopts the principle of stick-slip and convert the micro -movement of PZT piezo actuator into a millimeter -level long travel. It is very small, only 15 × 15 × 7mm^3. However, its travel can be as high as 3.6mm, which is very suitable for adjustment and application of the millimeter range in the limited space.
Characteristics
Travel to 3.6mm |
1 to 3 axes for choice |
• Speed up to 2mm/s |
Small size, light weight |
Self-locking at rest, requires no current |
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N11 vacuum version |
Application
Sample movement in super resolution imaging |
Micro -nano equipment and manufacturing |
Integrated circuit manufacturing and testing |
Scanning electron microscopy (SEM) sample manipulation |
Large-scale electronic bundle direct writing (EBL) |
High vacuum sample high-precision alignment and tuning posture |
Nano -focus and scanning |
Active optics |
Technical Data | ||
Type |
N11.X3.5K |
Units |
Active axes |
X |
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Nominal travel range |
3.6/±1.8 |
mm |
Max speed |
2 |
mm/s |
Open loop resolution |
20 |
nm |
Max force |
0.5 |
N |
Holding force(Passivity) |
1.5 |
N |
Max load (horizontal direction) |
0.3 |
kg |
Max load (vertical direction) |
0.03 |
kg |
Axial stiffness |
1 |
N/μm±10% |
Lateral stiffness |
2 |
N/μm±10% |
Operating temperature |
0~50 |
°C |
Cable length |
1.5 |
m±10% |
Material |
Al, stainless steel |
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Mass (not include cable) |
6 |
g±10% |
Recommended controller |
E53.C1K-J |
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