- Introduction
- Feedback
The F30.P3N3E macro and micro composite piezo stage is composed of the CoreMorrow P63.XYZ7S high-resolution piezo nanopositioning stage and the N56.XYZ10E piezo motor stage with millimeter travel. The macro-motion travel can reach 10mm per axis, and the micro-motion travel can reach 8.5μm per axis. The overall structure can achieve a millimeter-level travel range and sub-nanometer resolution at the same time, making it suitable for large-stroke and high-precision applications.
Characteristics
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| Technical Data | ||
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Type |
F30.P3N3E |
Units |
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Active axes |
X、Y、Z |
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Travel range (Coarse + Fine) |
10+8.5 |
mm+μm |
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Material
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Al |
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Load capacity |
100 |
g |
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Coarse Adjustment
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Type |
N56.XYZ10E |
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Active axes
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X、Y、Z |
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Travel range
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10 or ±5/axis |
mm±10% |
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Sensor
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Grating sensor
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Resolution
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6 |
nm±20% |
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Max speed
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4 |
mm/s±20% |
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Linearity
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2.13 |
μm |
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Repeatability
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0.48 |
μm |
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Controller
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E53.D1E-J |
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Fine Adjustment
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Type |
P63.XYZ7S |
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Active axes
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X、Y、Z |
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Drive control
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3 driving channels
3 sensing channels
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Travel range
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8.5/axis |
μm±10% |
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Sensor
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SGS |
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Resolution
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0.2 | nm |
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Linearity
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0.4 |
%F.S. |
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Repeatability
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0.2 |
%F.S. |
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Pitch/yaw/roll
|
＜15 |
μrad |
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El. capacitance
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0.8/axis |
μF±20% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
