- Introduction
- Feedback
The N56.XYZTR20 stage has 6-axis motion of θx, θy, θz, X, Y, and Z based on CoreMorrow N56 series linear piezo motor. Collaborate with precision algorithms, it is able to achieve high precision 6-axis motion control.
Characteristics
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Recommended Controller 
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| Technical data | ||
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Type |
N56.XYZTR20E |
Units |
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Active axes
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X，Y，Z，θx，θy，θz
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Sensor
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Grating sensor
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Travel range in X, Y
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±10
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mm |
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Travel range in Z
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±5
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mm |
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Tilt angle in θx, θy
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±10
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° |
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Tilt angle in θz
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±15
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° |
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Linear resolution
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X7.7/Y7/Z6.2
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nm
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Deflection resolution
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θxθy0.32/θz0.35
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μrad
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Linearity
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X0.023/Y0.022/Z0.011/θx0.93/θy1.1/θz0.55
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%F.S.
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Repeatability
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X0.019/Y0.012/Z0.01/θx0.06/θy0.04/θz0.035
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%F.S.
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Load capacity
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0.5 |
kg |
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Driving mode
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Piezo motor
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Mass |
1 |
kg±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
