- Introduction
- Feedback
Considering the user's requirement of high precision and long travel, the XYZ65N81E26 piezo screw motion platform has been specially designed and developed by CoreMorrow. The platform is equipped with an grating sensor, which can precisely control the travel and accuracy, and the accuracy can reach 1.5μm.
Characteristics
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Motion in X, Y, ZApplication
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| Technical Data | ||||
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Type |
X65N81E26 |
XY65N81E26 |
XYZ65N81E26 |
Units |
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Active axes |
X |
X、Y |
X、Y、Z |
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Integrated sensor |
grating sensor |
grating sensor |
grating sensor |
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Travel range |
±12.5 |
±12.5 |
±12.5 |
mm |
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Speed limit |
50 |
50 |
50 |
μm/s±20% |
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Resolution |
80 |
80 |
80 |
nm±20% |
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Linearity |
1.5 |
1.5 |
1.5 |
μm±20% |
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Repeatability |
1.5 |
1.5 |
1.5 |
μm±20% |
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Load capacity |
5 |
5 |
1.5 |
kg |
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Operating |
0~50 |
0~50 |
0~50 |
℃ |
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Mass with cable |
0.4 |
1.7 |
2.6 |
kg±5% |
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Material |
Al, Steel |
Al, Steel |
Al, Steel |
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Cable length |
1.5 |
1.5 |
1.5 |
m±10mm |
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Recommended Controller |
E53.D1E |
E53.D1E |
E53.D1E |
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Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
