Considering the user's requirement of high precision and long travel, the N81E26XYZ65 piezo screw motion platform has been specially designed and developed by CoreMorrow. The platform is equipped with an grating sensor, which can precisely control the travel and accuracy, and the accuracy can reach 1.5μm.
Characteristics
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Application
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Technical Data | ||||
Type |
N81E26X65 |
N81E26XY65 |
N81E26XYZ65 |
Units |
Active axes |
X |
X、Y |
X、Y、Z |
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Integrated sensor |
grating sensor |
grating sensor |
grating sensor |
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Travel range |
±12.5 |
±12.5 |
±12.5 |
mm |
Speed limit |
50 |
50 |
50 |
μm/s±20% |
Resolution |
80 |
80 |
80 |
nm±20% |
Linearity |
1.5 |
1.5 |
1.5 |
μm±20% |
Repeatability |
1.5 |
1.5 |
1.5 |
μm±20% |
Load capacity |
5 |
5 |
1.5 |
kg |
Operating |
0~50 |
0~50 |
0~50 |
℃ |
Mass with cable |
0.4 |
1.7 |
2.6 |
kg±5% |
Material |
Al, Steel |
Al, Steel |
Al, Steel |
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Cable length |
1.5 |
1.5 |
1.5 |
m±10mm |
Recommended Controller |
E53.D1E |
E53.D1E |
E53.D1E |
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