Type

XY72N81K13

 XYZ72SN81K13

XYZ72KN81K13

Units

Active axes

X Y

X Y Z

X Y Z

XY travel range

±5

±5

±5

mm

Z travel range

-

8@150V

8@150V

μm

XY Min displacement increment

<30

<30

<30

nm

Z resolution

-

0.3

0.1

nm

Z sensor

-

SGS

-

Z linearity

-

0.25

-

%F.S.

Z repeatability

-

0.25

-

%F.S.

Z unloaded resonant frequency

-

2.5

2.5

kHz

Load

1.5

Upright: 500
Side:200

Upright: 500
Side:200

g

Aperture

φ35

φ35

φ35

mm

Mass

-

695

695

g

PZT connector

RJ11

RJ11

RJ11