- Introduction
- Feedback
H61.XYZTR0S/K 6-Axis Piezo Tilt Stage can produce sixaxis ultra-precision motion, suitable for static six-axis linear nano-positioning and angular nano-radian deflection. With a 50mm×50mm through hole in the center, it can be used for transmitted light applications.
Characteristics
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Application
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Type |
H61.XYZTR0S/K |
Units |
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Active axes |
X、Y、Z、θx、θy、θz |
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Drive control |
7 driving channels 6 sensing channels |
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XYZ Travel(0~120V) |
XY, 100/axis, Z: 25 |
μm±20% |
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XYZ Max.travel(0~150V) |
XY, 125/axis, Z: 31 |
μm±20% |
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Travel in θxθy(0~120V) |
±0.2/axis |
mrad±20% |
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Max.travel in θxθy(0~150V) |
±0.25/axis |
mrad±20% |
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Travel in θz(0~120V) |
±0.12/axis |
mrad±20% |
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Max.travel in θz(0~150V) |
±0.15/axis |
mrad±20% |
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Closed/ope-loop resolution in θx，θy |
0.5 |
μrad |
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Closed/ope-loop resolution in θz |
0.5 |
μrad |
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Closed/ope-loop resolution in xy |
<10 |
nm |
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Closed/ope-loop resolution in z |
2.5 |
nm |
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Linearity |
Linear 0.2, tilt 0.2 |
%F.S. |
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Repeatability |
Linear 0.1, tilt 0.1 |
%F.S. |
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Unloaded resonant frequency |
150 |
Hz±20% |
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Resonant frequency loading |
70（@2kg） |
Hz±20% |
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Sensor |
SGS/- |
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Load capacity |
Horizontal 2,vertical 0.1,invertad 0.2 |
kg |
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Central aperture
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50×50 |
mm |
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Using way |
Positive use, static |
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El. capacitance |
XY: 10.8/axis, Z:14.4, θxθyθz: 3.6/axis |
μF±20% |
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Mass |
3 |
kg |
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Material |
Steel, aluminum |
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Connector |
DB15 male×1 and DB15 female×1 |
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Note:
1.Above parameters are measured with the E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For highreliability and long-term operation, the recommended driving voltage is 0~120V.
2.The product platform has connectors in side and cables is independent.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
