H61.XYZTR0S/K-B2 6-Axis Piezo Tilt Stage can produce sixaxis ultra-precision motion, suitable for static six-axis linear nano-positioning and angular nano-radian deflection. With a 50mm×50mm through hole in the center, it can be used for transmitted light applications.
Characteristics
Motion in X, Y, Z, θx, θy, θz |
High load capacity |
Positive static use |
Optional closed loop sensor |
Application
Six-axis ultra-precision position adjustment |
Prism position adjustment |
Optical applications |
Transmitted light applications, etc. |
Technical Data | ||
Type |
H61.XYZTR0S/K-B2 |
Units |
Active axes |
X、Y、Z、θx、θy、θz |
|
Drive control |
7 driving channels 6 sensing channels |
|
XYZ Travel(0~120V) |
XY, 100/axis, Z: 25 |
μm±20% |
XYZ Travel(0~150V) |
XY, 125/axis, Z: 31 |
μm±20% |
Travel in θxθy(0~120V) |
±0.2/axis |
mrad±20% |
Travel in θxθy(0~150V) |
±0.25/axis |
mrad±20% |
Travel in θz(0~120V) |
±0.12/axis |
mrad±20% |
Travel in θz(0~150V) |
±0.15/axis |
mrad±20% |
Closed/ope-loop resolution in θx,θy |
0.5 |
μrad |
Closed/ope-loop resolution in θz |
0.5 |
μrad |
Closed/ope-loop resolution in xy |
<10 |
nm |
Closed/ope-loop resolution in z |
2.5 |
nm |
Linearity |
Linear 0.2, tilt 0.2 |
%F.S. |
Repeatability |
Linear 0.1, tilt 0.1 |
%F.S. |
Unloaded resonant frequency |
150 |
Hz±20% |
Resonant frequency loading |
70(@2kg) |
Hz±20% |
Sensor |
SGS/- |
|
Load capacity |
Upright 2,lateral 0.1,invertad 0.2 |
kg |
Central aperture
|
50×50 |
mm |
Using way |
Positive use, static |
|
El. capacitance |
XY: 10.8/axis, Z:14.4, θxθyθz: 3.6/axis |
μF±20% |
Mass |
<4 |
kg |
Material |
Steel, aluminum |
|
Note: Above parameters are measured with the E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For highreliability and long-term operation, the recommended driving voltage is 0~120V.
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