Type

S - closed loop

K - open loop

H63A.XYZTR25S

H63A.XYZTR25K

Units

Active axes

X、Y、Z、θx、θy、θz

X、Y、Z、θx、θy、θz

Drive control

7 driving channels 6 sensing channels

7 driving channels

XYZ travel range (0~100V)

XY：±80、Z：160

XY：±80、Z：160

μm±20%

XYZ Max.travel range (0~120V)

XY：±100、Z：200

XY：±100、Z：200

μm±20%

θxθyθz travel range (0~100V)

θxθy：±10、θz：1.28

θxθy：±10、θz：1.28

mrad±20%

θxθyθz Max.travel range (0~120V)

θxθy：±12.5、θz：1.6

θxθy：±12.5、θz：1.6

mrad±20%

Integrated sensor

SGS

-

XYZ resolution

7

2

nm

θxθyθz resolution

θxθy：0.9、θz：0.06

θxθy：0.25、θz：0.01

μrad

Closed-loop linearity

0.5

-

%F.S.

Closed-loop repeatability

0.2

-

%F.S.

Unloaded resonant frequency

X140/Y150/Z200

θx270/θy280/θz110

X140/Y150/Z200

θx270/θy280/θz110

Hz±20%

Load capacity

0.2

0.2

kg±5%

El. capacitance

XYθxθy：14.4

Z：28.8  θz：3.6

XYθxθy：14.4

Z：28.8  θz：3.6

μF/轴±20%

Material

Steel, Aluminum

Steel, Aluminum

Mass

960(Not include cable)

960(Not include cable)

g±5%