Type

S - closed loop

K - open loop

H63.XYZTR1S

H63.XYZTR1K

Units

 Active axes

X, Y, Z, θx, θy, θz

X, Y, Z, θx, θy, θz

 Drive control

7 driving channels 6 sensing channels

7 driving channels

 Motion & Position

 X, Y, Z travel range (0~100V)

4

4

μm±10%

 X, Y, Z Max.travel range (0~120V)

4.8

4.8

μm±10%

 θx, θy, θz deflection angle (0~100V)

0.6

0.6

mrad±10%

 θx, θy, θz Max.deflection angle (0~120V)

0.8

0.8

mrad±10%

 Integrated sensor

SGS

-

 Closed/open-loop angular resolution

0.15

0.01

μrad

 Closed/open-loop linear resolution

1.5

0.1

nm

 Closed-loop linearity

0.25

0.25

%F.S.

 Closed-loop repeatability

0.2

0.2

%F.S.

 Mechanical Property

 Unloaded resonant frequency

X2330/Y895/Z1425/
θx3485/θy5620/θz2300

X2330/Y895/Z1425/
θx3485/θy5620/θz2300

Hz±20%

Unloaded closed-loop step time

25

25

ms

 Load capacity

500

500

g

 Drive Performance

 El. capacitance, XYZ

1.8

1.8

μF/axis±20%

 El. capacitance, θx, θy, θz

3.6

3.6

μF/axis±20%

 Others

 Material

Steel, Aluminum

Steel, Aluminum

 Mass

440(Not include cable)

440(Not include cable)

g±5%

 Cable length

1.5

1.5

m±10mm

 Sensing/voltage Connector**

J30J-31ZKS

J30J-31ZKS