- Introduction
- Feedback
H32.TR4S/K is a three-dimensional motion piezo tilt/rotation stage that can achieve θx, θy deflection and θz rotation. It adopts a frictionless flexible hinge structure design internally, with fast response speed and high closed-loop positioning accuracy. Its size is 155×155×50.5mm^3, and the load capacity can reach 1kg. It can be used as a vibration platform to simulate vibration environments and complete control accuracy testing and analysis of precision equipment.
Characteristics
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Application
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 Interference/Measurement
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Technical Data |
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Type |
S-Closed loop |
H32.TR4S |
H32.TR4K |
Units |
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K-Open loop |
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Active axes |
θx、θy、θz |
θx、θy、θz |
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Drive control |
4 driving channels |
4 driving channels |
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Nominal tilt angle range(0~120V) |
θxθy±1.85（≈382''）/θz2.6（≈536''） |
θxθy±1.85（≈382''）/θz2.6（≈536''） |
mrad±10% |
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Max. tilt angle range(0~150V) |
θxθy±2.3（≈475''）/θz3.2（≈660''） |
θxθy±2.3（≈475''）/θz3.2（≈660''） |
mrad±10% |
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Sensor |
SGS |
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Resolution |
θxθy0.15(≈0.03'')/θz0.1(≈0.02'') |
θxθy0.07(≈0.01'')/θz0.05(≈0.01'') |
µrad |
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Linearity |
θx0.07/θy0.03/θz0.09 |
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%F.S. |
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Repeatability |
θx0.02/θy0.03/θz0.1 |
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%F.S. |
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Unloaded resonant frequency |
θxθy250/θz560 |
θxθy250/θz560 |
Hz±20% |
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Loaded resonant frequency@1kg |
θxθy140/θz200 |
θxθy140/θz200 |
Hz±20% |
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Step time |
30@1kg |
10 |
ms±20% |
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Load capacity |
Horizontal |
1 |
1 |
kg |
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Vertical |
0.5 | 0.5 | ||
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Inverted |
0.5 | 0.5 | ||
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El. capacitance |
θxθy14.4/θz10.8 |
θxθy14.4/θz10.8 |
μF±20% |
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Material |
Stainless steel, aluminum alloy |
Stainless steel, aluminum alloy |
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Mass(Cable not included) |
2240 |
2240 |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
