- Introduction
- Feedback
H30 is a piezo scanning and rotation stage with 3 axes motion in X, Y and θz, and with a Ø60mm central large aperture. It adopts frictionless flexible hinge structure design, featuring fast response speed and high precision of closed-loop positioning. The central large aperture makes it easy to integrate into microscopic and scanning optical system.
Characteristics
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| Technical Data | |||
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Type |
H30.XY100R2S |
H30.XY100R2K |
Units |
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Active axes |
X、Y、θz |
X、Y、θz |
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Drive control |
4 driving channels 3 sensing channels |
4 driving channels |
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XY travel range(0~120V) |
±56/axis |
±56/axis |
μm±10% |
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XY travel range(0~150V) |
±70/axis |
±70/axis |
μm±10% |
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θz angle range(0~120V) |
1.6（≈330″） |
1.6（≈330″） |
mrad±10% |
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θz range(0~150V) |
2（≈413″） |
2（≈413″） |
mrad±10% |
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Sensor |
SGS |
- |
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Resolution in XY |
6 |
2 |
nm |
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Resolution in θz |
0.3（≈0.06″） |
0.1（≈0.02″） |
μrad |
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Linearity in XY |
X0.14/Y0.125 |
- |
%F.S. |
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Linearity in θz |
0.07 |
- |
%F.S. |
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Repeatability in XY |
X0.057/Y0.018 |
- |
%F.S. |
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Repeatability in θz |
0.03 |
- |
%F.S. |
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Unloaded resonant frequency |
XY450/θz330 |
XY450/θz330 |
Hz±20% |
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Loaded resonant frequency@6kg |
XY110/θz85 |
XY110/θz85 |
Hz±20% |
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El. capacitance |
XY15/θz28.8 |
XY15/θz28.8 |
μF±20% |
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Step time |
150@6kg |
5 |
ms±20% |
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Load capacity |
6 |
6 |
kg |
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Material |
Aluminum alloy |
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Mass(Cable not included) |
2.3 |
kg±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
