Other Piezo Tip/Tilt StageCurrent Location：Product Homepage >> Piezo Z/Tip/Tilt Stages>>Other Piezo Tip/Tilt Stage
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    Technical Data
 Type 20060 Units
 Active axes θx、θy
 Integrated sensor SGS
 Travel range(0~120V) ±1 mrad±20%
 Travel range(0~150V) ±1.25 mrad±20%
 Closed/open-loop resolution 0.25/0.05 μrad
 Linearity 0.2/- %F.S.
 Repeatability 0.1/- %F.S.
 Unloaded resonant frequency 200 Hz±20%
 Push/pull capacity 100/20 N±20%
 El. capacitance 14.4/axis μF±20%
 Material 5 kg±5%
 Material Steel, Aluminum
    Drawings（Click on the picture to enlarge it）
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    Technical Data
 Type 21031 Units
 Active axes θz
 Sensor SGS
 Travel range(0~150V) 2 mrad±20%
 Open-loop resolution 0.02 μrad±20%
 Closed loop resolution @ 20mV ripple 0.3(Expected) μrad±20%
 Repeatability 0.1 %F.S. ±20%
 Unloaded resonant frequency 3000 Hz±20%
 El. capacitance 3.6 μF±20%
 Load capacity 1 kg±5%
 Material Aluminium
    Drawings（Click on the picture to enlarge it）
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    Technical Data
 Type 21075 Units
 Active axes θx、θy、Z
 Linear travel(0~120V) 200 μm±5%
 Linear travel(0~150V) 250 μm±5%
 Tilt range(0~120V) ±1.6 mrad±20%
 Tilt range(0~150V) ±2 mrad±20%
 Size 150×150×40 mm^3
 Sensor SGS
 Closed/open loop linear resolution 20/10 nm
 Closed/open loop tilt resolution 0.25/0.05 μrad
 Linearity 0.2 %F.S.
 Repeatability 0.1 %F.S.
 Push/pull force 100/20 N
 Unloaded resonant frequency 180/180/150 Hz±20%
 Load capacity 3 kg
 El. capacitance X14.4/Y14.4/Z36 μF±20%
 Material Steel, aluminum
 Mass 2.5 kg±10%
    Drawings（Click on the picture to enlarge it）
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    Technical Data

Type

21087-1

21087-2

Units

 Active axes

θz

θz

 

 Driving channels

3

3


 Travel range(0~120V)

0.4

0.4

mrad±20%

 Travel range(0~150V)

0.5

0.5

mrad±20%

 Sensor

SGS

SGS


 Size 

220×220×90

170×170×76

mm

 Closed/open loop resolution

0.03/0.01

0.03/0.01

μrad

 Linearity

0.2

0.2

%F.S.±20%

 Repeatability

0.1

0.1

%F.S.±20%

 Unloaded resonant frequency

650

800

Hz±20%

 Load capacity

50

20

kg

 El. capacitance

28.8/axis

21.6/axis

μF±20%

 Material

Steel, aluminum

Steel, aluminum


 Mass

15

8

kg

    Drawings（Click on the picture to enlarge it）
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    Drawings（Click on the picture to enlarge it）
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    Technical Data
 Type 21101 Units
 Active axes θz
 Travel range(0~150V) 1.5 mrad±20%
 Open-loop resolution 0.03 μrad±20%
 Repeatability 0.2 %F.S. ±20%
 Unloaded resonant frequency 9000 Hz±20%
 Operating frequency@30g, 10μrad 0.9 kHz±20%
 El. capacitance 3.6 μF±20%
 Mass(not include cable) <0.1 kg±20%
 Material Steel
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
 Type 21180 Units
 Active axes θx、θy、Z
 Linear travel(0~150V) 500 μm±20%
 Tilt angle(0~150V) ±1/axis mrad±20%
 Sensor SGS, high accuracy
 Resolution in Z 67@20mV  nm
 Resolution(θx, θy) 0.3 μrad
 Linearity 0.4 %F.S.
 Repeatability 0.25 %F.S.
 Unloaded resonant frequency 30 Hz±20%
 Resonant frequency@1.5kg 20 Hz±20%
 Load capacity 1.5 kg
 El. capacitance(Z) 86.4 μF±20%
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
 Type 21205 Units
 Active axes θx、θy
 Travel range(0~120V) ±3.5 mrad±20%
 Sensor SGS, high accuracy
 Unloaded resonant frequency
 		170 Hz±20%
 Resonant frequency (@10×10×2mmmirror)
 		160 Hz±20%
 El. capacitance 10.8/axis μF±20%
 Material Steel, Aluminum
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
 Type 22033 Units
 Active axes θz
 Travel(0~150V) 1 mrad±20%
 Sensor SGS
 Closed loop resolution 0.03 μrad±20%
 Linearity
 		0.2 %F.S.
 Repeatability 0.1 %F.S.
 Load capacity 6 kg±5%
 El. capacitance 14.4 μF±20%
 Material Steel, Al
 Mass 2 kg
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
 Type 22038 Units
 Active axes X, Y, θz
 XY travel(0~150V) 50/axis μm±20%
 θz rotation travel(0~150V) 9 mrad±20%
 XY 开 / Closed loop resolution 0.5/2 nm±20%
 θz 开 / Closed loop resolution 0.1/0.3 μrad±20%
 Sensor SGS
 Linearity
 		0.2 %F.S.
 Repeatability 0.15 %F.S.
 XY El. capacitance 5.4 μF/axis ±20%
 θz El. capacitance 21.6 μF/axis ±20%
 Load capacity 0.2 kg±5%
 Material Steel, Al
 Mass <0.5 kg±5%
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
 Type 22044 Units
 Active axes θx、θy
 Travel(0~150V) 20/axis arcsecond
 Sensor SGS
 Closed/open-loop resolution 0.2/0.1 μrad±20%
 Linearity 0.2 %F.S.±20%
 Repeatability 0.1 %F.S.±20%
 Unloaded resonant frequency 1000 Hz±20%
 Load capacity 5 kg
 Mass 6.5 ms±20%
 El. capacitance 7.2/axis μF±10%
 Material Steel, Al
 Mass 5  kg±10%
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
 Type 22064 Units
 Active axes θx
 Travel(0~150V) 0.3 mrad±20%
 Unloaded resonant frequency
 		1000 Hz±20%
 Load capacity 10 kg
 Operating frequency 
@10kg load and 
0.1mrad tilt
 		100 Hz±20%
 El. capacitance 14.4/axis μF±10%
 Mass  5.5 kg±10%
 Material Steel, Al
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
 Type 22104 Units
 Active axes θx、θy
 Travel(0~150V) 1.5 mrad±20%
 Sensor SGS
 Load capacity 2 kg±5%
 Unloaded resonant frequency
 		400 Hz±20%
 Closed loop resolution 0.5 μrad
 Linearity 0.2 %F.S.
 Repeatability 0.1 %F.S.
 El. capacitance 7.2/axis μF±20%
 Material Steel, Al
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
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