- Introduction
- Feedback
S50.UR0C/K-A piezo tilt/rotation platform is designed for large load applications, and load capacity is up to 5kg. Its closed-loop version utilizes capacitive feedback sensor, and its unloaded resonant frequency is up to 1kHz.
Characteristics
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Applications
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| Technical Data | |||
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Types |
S50.UR0C-A |
S50.UR0K-A |
Units |
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Active axes |
θx θz |
θx θz |
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Drive control |
3 driving channels 2 sensing channels |
3 driving channels |
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Nominal travel range( 0~120V)
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0.24/axis |
0.24/axis |
mrad±20% |
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Max.travel range(0~150V)
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0.3/axis |
0.3/axis |
mrad±20% |
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Sensor type |
CAP |
- |
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Resolution |
0.02 |
0.01 |
nm |
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Linearity |
0.3 |
- |
%F.S. |
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Repeatability |
0.2 |
- |
%F.S. |
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Unloaded resonant frequency |
1000 |
1000 |
Hz±20% |
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Load capacity |
10 |
10 |
kg |
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El.capacitance |
14.4/axis |
14.4/axis |
μF±20% |
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Material |
Al, Steel |
Al, Steel |
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Mass |
9.5 |
9.5 |
kg±5% |
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Tel：0451-86268790
Piezo · Nano · Motion
