S50.UR0C/KA Piezo Tilt/Rotation PlatformCurrent Location:Product Homepage >> Piezo Z/Tip/Tilt Stages>>S50.UR0C/KA Piezo Tilt/Rotation Platform
CoreMorrow piezo tilt platform
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S50.UR0C/KA piezo tilt/rotation platform is designed for large load applications, and load capacity is up to 5kg. Its closed-loop version utilizes capacitive feedback sensor, and its unloaded resonant frequency is up to 1kHz.


Characteristics


 θx tilt and θz rotation

 Large load capacity

 High frequency

 Optional capacitive feedback sensor


Applications


 Beam scanning

 Heavy load motion experiment

 Interference/metering

 Vibration simulation system

 For research


    Technical Data

Types

S50.UR0CA

S50.UR0KA

Units

Active axes

θx θz

θx θz

 

Drive control

3 driving channels 2 sensing channels

3 driving channels

 

Nominal travel range( 0~120V)

0.24/axis

0.24/axis

mrad±20%

Travel range(0~150V)

0.3/axis

0.3/axis

mrad±20%

Sensor type

CAP

-

 

Resolution

0.02

0.01

nm

Linearity

0.3

-

%F.S.

Repeatability

0.2

-

%F.S.

Unloaded resonant frequency

1000

1000

Hz±20%

Load capacity

10

10

kg

El.capacitance

14.4/axis

14.4/axis

μF±20%

Material

Al, Steel

Al, Steel

Mass

9.5

9.5

kg±5%

    Drawings(Click on the picture to enlarge it)
Click on the picture to enlarge the drawing of piezo tilt and rotation stage
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual


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Piezo · Nano · Motion

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