S50.UR0C/KA piezo tilt/rotation platform is designed for large load applications, and load capacity is up to 5kg. Its closed-loop version utilizes capacitive feedback sensor, and its unloaded resonant frequency is up to 1kHz.
Characteristics
θx tilt and θz rotation |
Large load capacity |
High frequency |
Optional capacitive feedback sensor |
Applications
Beam scanning |
Heavy load motion experiment |
Interference/metering |
Vibration simulation system |
For research |
|
Technical Data | |||
Types |
S50.UR0CA |
S50.UR0KA |
Units |
Active axes |
θx θz |
θx θz |
|
Drive control |
3 driving channels 2 sensing channels |
3 driving channels |
|
Nominal travel range( 0~120V)
|
0.24/axis |
0.24/axis |
mrad±20% |
Travel range(0~150V)
|
0.3/axis |
0.3/axis |
mrad±20% |
Sensor type |
CAP |
- |
|
Resolution |
0.02 |
0.01 |
nm |
Linearity |
0.3 |
- |
%F.S. |
Repeatability |
0.2 |
- |
%F.S. |
Unloaded resonant frequency |
1000 |
1000 |
Hz±20% |
Load capacity |
10 |
10 |
kg |
El.capacitance |
14.4/axis |
14.4/axis |
μF±20% |
Material |
Al, Steel |
Al, Steel |
|
Mass |
9.5 |
9.5 |
kg±5% |
|
|