- Introduction
- Feedback
S51.ZT2S/K-C Piezo Z/Tip/Tilt Platform is one customized piezo stage that tilts in θx、θy and moves in Z. There is a large aperture in its center that is suitable for light-transmitted applications.
Characteristics
|
|
|
|
|
|
|
|
|
|
Applications
|
|
|
|
|
|
|
|
|
| Technical Data | |||
|
Types |
S51.ZT2S-C |
S51.ZT2K-C |
Units |
|
Active axes |
θx、θy、Z |
θx、θy、Z |
|
|
Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
|
|
Nominal travel in Z（0 ~120V） |
192 |
192 |
μm±20% |
|
Max.travel in Z（0 ~150V） |
240 |
240 |
μm±20% |
|
Nominal travel in θx θy（0 ~120V） |
±1.6/axis |
±1.6/axis |
mrad±20% |
|
Max.travel in θx θy（0~150V） |
±2/axis |
±2/axis |
mrad±20% |
|
Sensor type |
SGS |
- |
|
|
Resolution in Z |
7 |
2 |
nm |
|
Resolution in θx θy |
0.15 |
0.06 |
μrad |
|
Linearity in Z |
0.3 |
- |
%F.S. |
|
Linearity in θx θy |
0.3 |
- |
%F.S. |
|
Repeatability in Z |
0.3 |
- |
%F.S. |
|
Repeatability in θx θy |
0.1 |
- |
%F.S. |
|
Unloaded resonant frequency |
160 |
160 |
Hz±20% |
|
Load capacity |
1.5 |
1.5 |
kg |
|
El.capacitance |
21.6/axis |
21.6/axis |
μF±20% |
|
Material |
Al, Steel |
Al, Steel |
|
|
Mass |
1070 |
1070 |
g±5% |
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
