- Introduction
- Feedback
S51.ZT2S/K-C1 Piezo Z/Tip/Tilt Platform is one customized piezo stage that tilts in θx、θy and moves in Z. There is a large aperture in its center that is suitable for light-transmitted applications.
Characteristics
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Applications
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| Technical Data | |||
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Types |
S51.ZT2S-C1 |
S51.ZT2K-C1 |
Units |
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Active axes |
θx、θy、Z |
θx、θy、Z |
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Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
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Nominal travel in Z（0 ~120V） |
192 |
192 |
μm±20% |
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Travel in Z（0 ~150V） |
240 |
240 |
μm±20% |
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Nominal travel in θx θy（0 ~120V） |
±1.6/axis |
±1.6/axis |
mrad±20% |
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Travel in θx θy（0~150V） |
±2/axis |
±2/axis |
mrad±20% |
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Sensor type |
SGS |
- |
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Resolution in Z |
7 |
2 |
nm |
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Resolution in θx θy |
0.15 |
0.06 |
μrad |
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Linearity in Z |
0.3 |
- |
%F.S. |
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Linearity in θx θy |
0.3 |
- |
%F.S. |
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Repeatability in Z |
0.3 |
- |
%F.S. |
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Repeatability in θx θy |
0.1 |
- |
%F.S. |
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Unloaded resonant frequency |
160 |
160 |
Hz±20% |
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Load capacity |
1.5 |
1.5 |
kg |
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El.capacitance |
21.6/axis |
21.6/axis |
μF±20% |
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Material |
Al, Steel |
Al, Steel |
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Mass |
1070 |
1070 |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
