- Introduction
- Feedback
Characteristics
|
|
|
|
|
|
|
|
|
|
|
Motion in θx, θy and Z 
|
Travel vs Voltage Curves 
|
Linearity vs Control Voltage Curve 
|
| Technical Data | |||
|
Types |
S51.ZT1S-C |
S51.ZT1K-C |
Units |
|
Active axes |
θx、θy、Z |
θx、θy、Z |
|
|
Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
|
|
Nominal travel in Z（0~120V） |
90 |
90 |
μm±10% |
|
Max.travel in Z（0~150V） |
110 |
110 |
μm±10% |
|
Nominal travel in θx θy（0~120V） |
±0.9/axis（≈±190秒） |
±0.9/axis（≈±190秒） |
mrad±10% |
|
Max.travel in θxθy(0~150V) |
±1.1/axis（≈±220秒） |
±1.1/axis（≈±220秒） |
mrad±10% |
|
Sensor type |
SGS |
- |
|
|
Resolution in Z |
7 |
4 |
nm |
|
Resolution in θx θy |
0.25 |
0.05 |
μrad |
|
Linearity |
0.1 |
- |
%F.S. |
|
Repeatability |
0.05 |
- |
%F.S. |
|
Push/pull force |
120/15 |
120/15 |
N |
|
Stiffness in motion direction |
1.5 |
1.5 |
N/μm±20% |
|
Unloaded resonant frequency |
300 |
300 |
Hz±20% |
|
Unloaded step time |
35 |
5 |
ms±20% |
|
Load capacity |
2.5 |
2.5 |
Kg |
|
El.capacitance |
10.8/axis |
10.8/axis |
μF±10% |
|
Material |
Al, Steel |
Al, Steel |
|
|
Cable length |
1.5 |
1.5 |
m±0.1mm |
|
Mass |
815 |
815 |
g±5% |
Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for high-reliability and long-term use.
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
