- Introduction
- Feedback
Characteristics
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Motion in θx, θy and Z 
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Travel vs Voltage Curves 
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Linearity vs Control Voltage Curve 
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| Technical Data | |||
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Types |
S51.ZT1S-C1 |
S51.ZT1K-C1 |
Units |
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Active axes |
θx、θy、Z |
θx、θy、Z |
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Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
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Nominal travel in Z（0~120V） |
90 |
90 |
μm±10% |
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Travel in Z（0~150V） |
110 |
110 |
μm±10% |
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Nominal travel in θx θy（0~120V） |
±0.9/axis（≈±190秒） |
±0.9/axis（≈±190秒） |
mrad±10% |
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Travel in θxθy(0~150V) |
±1.1/axis（≈±220秒） |
±1.1/axis（≈±220秒） |
mrad±10% |
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Sensor type |
SGS |
- |
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Resolution in Z |
7 |
4 |
nm |
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Resolution in θx θy |
0.25 |
0.05 |
μrad |
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Linearity |
0.1 |
- |
%F.S. |
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Repeatability |
0.05 |
- |
%F.S. |
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Push/pull force |
120/15 |
120/15 |
N |
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Stiffness in motion direction |
1.5 |
1.5 |
N/μm±20% |
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Unloaded resonant frequency |
300 |
300 |
Hz±20% |
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Unloaded step time |
35 |
5 |
ms±20% |
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Load capacity |
2.5 |
2.5 |
Kg |
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El.capacitance |
10.8 |
10.8 |
μF±10% |
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Material |
Al, Steel |
Al, Steel |
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Cable length |
1.5 |
1.5 |
m±0.1mm |
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Mass |
815 |
815 |
g±5% |
Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for high-reliability and long-term use.
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Piezo · Nano · Motion
