- Introduction
- Feedback
The S54.T1S/K-C is a high-precision piezo tip/tilt stage moving in θx and θy, and travel up to 2mrad. Its design adopts a frictionless flexible hinge structure, ensuring rapid response times and superior positioning accuracy. The closed-loop version with sensors achieves the accuracy of ±0.011%F.S., making it suitable for high-precision applications. It also features a 110mm×80mm aperture, suitable for transmissive light applications.
Characteristics
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Loaded Step Time 
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Applications
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Type |
S-Closed loop |
S54.T1S-C |
S54.T1K-C |
Units |
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K-Open loop |
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Active axes |
θx，θy |
θx，θy |
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Drive control |
3 driving channels
2 sensing channels
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3 driving channels |
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Nominal tilt angle(0~120V) |
±0.8（≈±165''）/±0.6（≈±124''） |
±0.8（≈±165''）/±0.6（≈±124''） |
mrad±10% |
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Max. tilt angle(0~150V) |
±1（≈±206''）/±0.75（≈±155''） |
±1（≈±206''）/±0.75（≈±155''） |
mrad±10% |
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Integrated sensor |
SGS |
- |
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Aperture |
110×80 |
110×80 |
mm |
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Resolution |
0.1（≈0.02''） |
0.1（≈0.02''） |
μrad |
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Linearity |
θx0.01/θy0.009 |
- |
%F.S. |
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Repeatability |
θx0.011/θy0.023 |
- |
%F.S. |
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Unloaded resonant frequency |
445/490 |
445/490 |
Hz±20% |
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Resonant frequency@300g |
250/300 |
250/300 |
Hz±20% |
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Step time |
25@0.4mrad，300g |
5 |
ms±20% |
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Load capacity |
Horizontal |
300 |
300 |
g |
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El.capacitance |
3.6/axis |
3.6/axis |
μF±20% |
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Material |
Stainless steel, aluminum alloy |
Stainless steel, aluminum alloy |
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Mass(Cable included) |
560 |
560 |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
