- Introduction
- Feedback
S54A piezo tip/tilt stage that tilts in θx, θy, the deflection angle can reach ± 1.5mrad/axis. It has an aperture of φ112mm and its vertical load capacity is up to 1kg, which make it possible to carry a lens with a diameter of φ140mm×23mm for two-dimensional movement. The stage has been specially designed and made of materials to adapt to special environments, and can realize operating normally in low-temperature environments. It has passed very strict mechanical testing, such as anti mechanical vibration tests, impact vibration tests, and random vibration tests, etc.
Characteristics
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 UHV version available
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Recommended controller  |
Interface Introduction  |
| Technical Data | ||||
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Type |
S-Closed loop
K-Open loop
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S54A.T3S112 |
S54A.T3K112 |
Units |
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Active axes |
θx，θy |
θx，θy |
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Drive control |
3 driving channels
2 sensing channels
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3 driving channels |
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Nominal tilt angle(0~120V) |
±1.2/axis(≈±248″) |
±1.2/axis(≈±248″) |
mrad±10% |
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Max. tilt angle(0~150V) |
±1.5/axis(≈±309″) |
±1.5/axis(≈±309″) |
mrad±10% |
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Integrated sensor |
SGS |
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Aperture |
φ112 |
φ112 |
mm | |
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Resolution |
0.6（≈0.12秒） |
0.2（≈0.04秒） |
μrad |
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Linearity |
θx0.3/θy1.2 |
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μrad |
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Repeatability |
θx0.2/θy0.6 |
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μrad |
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Unloaded resonant frequency |
460 |
460 |
Hz±20% |
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Resonant frequency@1kg |
310 |
310 |
Hz±20% |
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Step time |
5ms@50μrad，1kg |
2 |
ms±20% |
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Load capacity |
Horizontal |
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kg |
| Vertical | 1 | 1 | ||
| Inverted | - | - | ||
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El.capacitance |
28.8/axis |
28.8/axis |
μF±20% |
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Material |
Stainless steel, aluminum alloy |
Stainless steel, aluminum alloy |
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Mass(Cable included) |
6.2 |
6.2 |
kg±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
