Characteristics

Motion in X, Y, Z, θx, θy, θz

Optional closed-loop feedback sensor

Load capacity up to 10kg

Ultrahigh resolution

Technical Data
Type	H64.XYZTR0S	H64.XYZTR0K	Units
Active axes	X、Y、Z、θx、θy、θz	X、Y、Z、θx、θy、θz
Drive control	6 driving channels 6 sensing channels	6 driving channels
XYZ nominal travel range(0~120V)	XY14.4/Z30	XY14.4/Z30	μm±10%
XYZ Max.travel range(0~150V)	XY18/Z37.5	XY18/Z37.5	μm±10%
θxθyθz nominal travel range(0~120V)	θxθy0.32（≈66″）/θz1.3（≈268″）	θxθy0.32（≈66″）/θz1.3（≈268″）	mrad±10%
θxθyθz Max.travel range(0~150V)	θxθy0.4（≈83″）/θz1.6（≈330″）	θxθy0.4（≈83″）/θz1.6（≈330″）	mrad±10%
Integrated sensor	SGS	-
XYZ resolution	XY0.6/Z1.25	XY0.2/Z0.4	nm
θxθyθz resolution	θxθy13/θz50（＜0.01″）	θxθy4/θz16（＜0.01″）	nrad
Linearity	X0.053/Y0.02/Z0.084/θx0.167/θy0.1/θz0.125	-	%F.S.
Repeatability	X0.091/Y0.2/Z0.063/θxθy0.134/θz0.108	-	%F.S.
El. capacitance	XY6.8/θxθyZ14.2/θz62.5	XY6.8/θxθyZ14.2/θz62.5	μF±20%
Load capacity	10	10	kg
Unloaded resonant frequency	XY180/Z260/θz150	XY180/Z260/θz150	Hz±20%
Loaded resonant frequency@10kg	XY100/Z150/θz100	XY100/Z150/θz100	Hz±20%
Closed-loop step time	XYZθxθy60/θz500	-	ms±20%
Mass	9.5(Not include cable)		kg±5%
Material	Steel, Al	Steel, Al

Drawing （Click on the picture to enlarge it）

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