Type

S52.ZT2S

S52.ZT2K

Units

Active axes

θx, θy, Z

θx, θy, Z

Drive control

8 driving channels 

8 sensing channels

8 driving channels

Nominal travel in Z(0 ~120V)

174

174

μm±10%

Max.travel in Z(0 ~150V)

217

217

μm±10%

Nominal travel in θx θy(0~120V)

±1.10/axis

±1.10/axis

mrad±10%

Max.travel in θx θy(0~150V)

±1.37/axis

±1.37/axis

mrad±10%

Sensor type

SGS

-

Resolution in Z

3.5

2

nm

Resolution in θx θy

0.14

0.04

μrad

Closed-loop linearity in Z

0.013

-

%F.S.

Closed-loop linearity in θx θy

0.009/axis

-

%F.S.

Closed-loop repeatability in Z

0.009

-

%F.S.

Closed-loop repeatability in θx θy

θx：0.0067, θy：0.006

-

%F.S.

Blocking force in Z

220

220

N

Stiffness in Z

1.1

1.1

N/μm±20%

El.capacitance

θxθy：7, Z：28

θxθy：7, Z：28

μF±20%

Load capacity

5

5

kg

Unloaded resonant frequency

233

233

Hz±10%

Resonant frequency@2.5kg

θxθy：63, Z：68

θxθy：63, Z：68

Hz±10%

Step Time@2.5kg

θxθy：200, Z：300

θxθy：200, Z：300

ms±10%

Pitch angle in Z

20

20

μrad±10%

Yaw angle in Z

8.7

8.7

μrad±10%

Roll angle in Z

14.5

14.5

μrad±10%

Coupling in X/Y

θx：9.5, θy：8.7

θx：9.5, θy：8.7

μrad±10%

Coupling in horizontal direction

θx：17.3, θy：16.3

θx：17.3, θy：16.3

μrad±10%

Mass（Cable included）

2.5

2.5

kg±5%

Material

Al,  Steel

Al,  Steel