Other Piezo Tip/Tilt/Z PlatformCurrent Location：Product Homepage >> Fast Steering Mirrors>>Other Piezo Tip/Tilt/Z Platform
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    Technical Data
 Type 20072 Units
 Active axes θx、θy 
 Nominal travel range ±4/axis mrad±20%
 El. capacitance 28.8/axis μF±20％

 Resonant frequency@ 

Ø100×5mm mirror 

≥ 300 Hz±20％
    Drawings（Click on the picture to enlarge it）
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    Technical Data
 Type 21019 Units
 Active axes θx、θy、Z
 Integrated sensor SGS
 Tilt range(0~150V) 17 mrad±20%
 Z travel(0~150V) 150 μm±20%
 Unloaded resonant frequency 1 kHz±20%
 El. capacitance 3.6/axis μF±20%
 Material Aluminum, Steel
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
 Type 21068 Units
 Active axes θx、θy
 Tilt angle (0~150V) 1.7/±0.85 mrad±20%
 Sensor SGS
 Size 40×40×23.6 mm
 Frequency with load
(Mirror 34×34×4.9mm)
 		1.6 kHz±20%
 Linearity 0.3 %F.S.
 Repeatability 0.15 %F.S.
 El. capacitance
 		1.8/axis μF±20%
 Material Titanium alloy, steel, aluminum
 Line Position Side line
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
Type 22022 Units
 Active axes θx、θy 
 Norminal travel(0~120V) ±4 mrad±20%
 Travel(0~150V) ±5 mrad±20%
 Sensor SGS
 Unloaded resonant frequency 3.2 kHz±20%
 Loaded(Ø25.4×4mm mirror)
resonant frequency
 		1.9 kHz±20%
 El. capacitance 3.6/axis μF±20%
 Material Ti, Al
 Driving channels 3(with constant voltage)
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
 Type 22143 单位
 Active axes X、Y
 Sensor SGS
 Travel(0~150V) ±5/axis mrad±20%

 Loaded(Ø20×3mm mirror) resonant frequency

500 Hz±20%
 Closed loop resolution  0.5 μrad
 Linearity 0.2 %F.S.
 Repeatability 0.2 %F.S.
 El. capacitance 1.6/axis μF±20%
 Material Ti, steel
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
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