P32 series Piezo Tip/Tilt and Z Platform provides high-speed precision tilt motion of two axes and Z-axis linear motion. The resolution of linear motion can reach sub-nanometer level, deflection resolution reaches sub-microradians, and response time can reach milliseconds. The P32.ZT6S/K series of piezoelectric deflection mirrors are compact, enabling up to 11mrad deflection and 55μm Z-axis linear motion.
Characteristics
|
|
|
|
θx θy Z motion ![]() |
Optional mirror adapter ![]() |
Integrated Piezo Deflection System ![]() |
Frequency and Load Curves ![]() |
Closed-loop Curve ![]() |
Load Step Time ![]() |
High Resolution, Stability and Dynamics
P32 is compact and internally assembled with pre-load, high-reliability piezo actuator integrated into complex, flexible hinge guidance system that is modeled and analyzed by FEA. Piezoelectric actuators are stacked co-fired piezoelectric ceramics that provide better performance and reliability than conventional piezoelectric actuators. |
Driving Principle P32 piezo tip/tilt and Z platform is designed based on the mechanism drived by three piezo actuators that are placed at an angle intervals of 120°. In addition to tilting motion, this structural design also enables linear movement of the Z-direction, which can be used to correct the optical path length. In below drawing, A, B, C represent the measured displacement at the points, and the simple calculation formulas of the two-axis tilt angle and Z-direction displacement are as follows. ![]() |
Applications
|
|
|
|
|
|
|
|
Technical data | ||||
Models |
Suffix S - closed loop |
P32.ZT6SY |
P32.ZT6KY |
Units |
Active axes |
θx θy Z |
θx θy Z |
|
|
Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
|
|
θx, θy Tilt angle(0~120V) |
9(≈ 1854 ") |
9(≈ 1854 ") |
mrad±20% |
|
Travel in Z(0~120V) |
45 |
45 |
μm±20% |
|
θx, θy Max.tilt angle(0~150V) |
11(≈ 2268 ") |
11(≈ 2268 ") |
mrad±20% |
|
Max.travel in Z(0~150V) |
55 |
55 |
μm±20% |
|
Sensor type |
SGS |
- |
|
|
Resolution in θx, θy |
0.3(≈ 0.06") |
0.1(≈ 0.02") |
μrad |
|
Resolution in Z |
1.5 |
0.5 |
nm |
|
Linearity |
θx θy:0.2 Z:0.5 |
- |
%F.S. |
|
Repeatability |
θx θy:0.2 Z:0.5 |
- |
%F.S. |
|
Unloaded resonant frequency(θx, θy) |
4(2@Φ30x6mm mirror ) |
4(2@Φ30x6mm mirror ) |
kHz±20% |
|
Unloaded step time |
10 |
5 |
ms±20% |
|
El.capacitance |
5.4/axis |
5.4/axis |
μF±20% |
|
Material |
Steel |
Steel |
|
|
Mass |
350 |
350 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
|
|