
S23.ZT0S/K25 is small-sized piezo Z/tip/tilt platform with a volume of Ø49×34mm that allows deflection in θx, θy and motion in Z-axis, it can achieve a deflection travel of ±0.5mrad/axis in θx and θy, and a linear travel of 20.5μm in Z. The open-loop version features extremely high resolution and sub-millisecond response speed. The device is equipped with a aperture of Ø25.4mm, making it suitable for light-transmitting applications such as light filtering.
Characteristics

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Unloaded resonant frequency up to 4.2kHz
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Applications

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Beam stability
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Phase shifter
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Recommended Controller ![]() |
| Technical Data | ||||
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Type |
S-Closed loop
K-Open loop |
S23.ZT0S25
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S23.ZT0K25
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Units |
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Active axes |
θx、θy、Z |
θx、θy、Z |
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Drive control |
3 driving channels |
3 driving channels |
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| Nominal travel in Z(0~120V) | 13.5 | 13.5 |
μm±10% |
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Max.travel in Z(0~150V) |
17 | 17 |
μm±10% |
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Nominal tilt angle(0~120V) |
±0.35/axis(≈±72'') |
±0.35/axis(≈±72'') |
mrad±10% |
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Max. tilt angle(0~150V) |
±0.45/axis(≈±93'') |
±0.45/axis(≈±93'') |
mrad±10% |
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Integrated sensor |
SGS |
- |
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| Aperture |
Ø25.4 |
Ø25.4 |
mm | |
| Resolution in Z | 0.68 | 0.02 | nm | |
| Resolution in θx θy |
0.03(<0.01'') |
0.001(<0.01'') |
μrad |
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Linearity |
θxθy0.07/Z0.3 |
- |
%F.S. |
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Repeatability |
θx0.08/θy0.06/Z0.1 |
- |
%F.S. |
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Unloaded resonant frequency |
6 |
6 |
kHz±20% |
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Resonant frequency@50g |
θx1.7/θy2/Z2.3 |
θx1.7/θy2/Z2.3 |
kHz±20% |
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| Load capacity | 50 | 50 | g | |
| El.capacitance | 2/axis |
2/axis |
μF±20% |
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| Step time |
10@50g |
4 |
ms±20% |
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Material |
Stainless steel |
Stainless steel |
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| Cable length | 1.5 | 1.5 | m±0mm | |
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Mass(not include cable) |
250 |
250 |
g±5% |
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