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S31 is θx, θy piezo tip/tilt platform, with two ranges available: 3.8mrad and 8.5mrad. The closed-loop version has a full bridge design which avoids temperature drift and ensures the high accuracy.
Characteristics
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| Technical Data | |||
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Type |
S31.T2S
S31.T2K
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S31.T4S |
Units |
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Active axes |
θx、θy |
θx、θy |
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Drive control |
3 driving channels
2 sensing channels
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3 driving channels |
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Nominal tilt angle(0~120V) |
3/±1.5（≈±309″） |
6.8/±3.4（≈±700″） |
mrad±10% |
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Max.tilt angle(0~150V) |
3.8/±1.9（≈±392″） |
8.5/±4.25（≈±877″） |
mrad±10% |
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Integrated sensor |
SGS/- |
SGS/- |
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Resolution |
0.5（≈0.1″）/0.05（≈0.01″） |
0.5（≈0.1″）/0.1（≈0.02″） |
μrad |
| Linearity |
0.5/- |
0.5/- |
%F.S. |
| Repeatability |
0.5/- |
0.3/- |
%F.S. |
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Unloaded resonant frequency |
12 |
11.5 |
KHz±20% |
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Resonant frequency@Φ12.7×3mm mirror |
9 |
9 |
KHz±20% |
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El.capacitance |
1.6/ axis |
3.2/ axis |
μF±20% |
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Material |
Steel, Ti |
Steel, Ti |
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Mass(including wires and connectors) |
115 |
148 |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
