P92.X25 Fast Tool Positioning StagesCurrent Location:Product Homepage >> Fast Tool Positioning Stage>>P92.X25 Fast Tool Positioning Stages
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产品特点


 Active axes  X

 Travel range(0~120V)18μm

 Resolution 5nm

 El. capacitance 7.2μF

    Technical Data

Type

P92.X25S

P92.X25K

Units

Active axes

X

X

Travel range(0~120V)

22

22

μm±10%

Travel range(0~150V)

28

28

μm±10%

Integrated sensor

SGS

-

Resolution

1

0.5

nm

Unloaded resonant frequency

5000

5000

Hz±20%

Unloaded step time

0.3

0.3

ms

Stiffness

50

50

N/μm±20%

Blocking force

1000

1000

N

El. capacitance

7.2

7.2

μF±10%

Material

Aluminium, steel 

Aluminium, steel 

Mass

1080

1080

g±5%

Operating temperature

-25~+80

Note: The above parameters are measured using E00/E01 piezo controllers. The max driving voltage can be -20~150V; For highreliability and long-term operation, the recommended driving voltage is 0~120V.


Recommended Controller


E01.D1 Servo Piezo Controller


E01.A1 Piezo Amplifier


E52 Open-loop/Servo Piezo Controller

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