- Introduction
- Feedback
XD611.XYZ500 piezo nanopositioning stage moves in XYZ, and its travel is up to 500μm. It’s ideal for 3 axes nanopositioning.
Characteristics
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XD611.XYZ500 
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Applications
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| Technical Data | ||||
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Type |
XD611.XYZ500S |
XD611.XYZ500K |
Units |
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Active axes |
X、Y、Z |
X、Y、Z |
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Norminal travel（0~120V） |
400/axis |
400/axis |
µm±20% |
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Max.travel（0~150V） |
500/axis |
500/axis |
µm±20% |
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Sensor |
SGS |
- |
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Closed/open-loop |
18 |
7 |
nm |
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Linearity |
0.1 |
- |
%F.S. |
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Repeatability |
0.05 |
- |
%F.S. |
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Unloaded resonant frequency |
X0.08/Y0.13/Z0.08 |
X0.08/Y0.13/Z0.08 |
kHz±20% |
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Load capacity |
Horizontal |
0.2 |
0.2 |
kg |
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Vertical |
0.02 | 0.02 | ||
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Inverted |
0.02 | 0.02 | ||
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El.capacitance |
14.4/axis |
14.4/axis |
μF±20% |
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Mass |
850 |
850 |
g±5% |
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Material |
Steel, Al |
Steel, Al |
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Note: Max driving voltage could be -20V~150V, recommended voltage 0~120V for long-term and high-reliable operation to extend lifetime. Technical data is measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
