- Introduction
- Feedback
The interior of the XD810 piezo stage is divided into a vibration structure and a shock-absorbing (vibration-damping) structure. The vibration and displacement output is performed by controlling the vibration structure, and the vibration and displacement output is reversely controlled by the algorithm to control the vibration-damping structure.
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Principle The basic control principle block diagram of the closed-loop multi-dimensional vibration system is shown below. 
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Schematic Diagram of XD810 Control Channel 
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Recommended Piezo Controller E01.D6 Piezo Controller(6 channels) 
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| Technical Data | ||
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Type |
XD810 Specs |
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Performance |
Vibration structure |
Vibration-damping structure |
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XY travel |
28um±20% |
28um±20% |
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Z travel |
15um±20% |
15um±10% |
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X resonance |
500Hz±20% |
500Hz±20% |
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Y resonance |
450Hz±20% |
400Hz±20% |
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Z resonance |
400Hz±20% |
240Hz±20% |
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Max. Operating frequency
|
20Hz±20% |
20Hz±20% |
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El.capacitance in XY
|
7.2μF/axis±20% |
7.2μF/axis±20% |
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El.capacitance in Z
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5.7μF±20% |
3.6μF±20% |
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Piezo · Nano · Motion
