Characteristics

XYZ motion

XY stroke to 43μm/axis

Z stroke to 8μm8

closed loop sensor is optional

Technical data
Models	S-Closed loop K-Open loop	P13.XY50Z7S P13.XY50Z7K	Units
Active axes		XYZ
Drive control		3 driving channels 3 sensing channels
Travel range(0~120V)		X34/Y34/Z6	μm±10%
Travel range(0~150V)		X43/Y43/Z8	μm±10%
Integrated sensor		SGS/-
Closed/open loop resolution		XY1.5/0.5、 Z0.5/0.1	nm
Closed-loop linearity		0.2/-	%F.S.
Repeatability		0.1/-	%F.S.
Pitch/Yaw/Roll		-	μrad
Push/pull force capacity		-	N
Stiffness			N/μm±20%
Unloaded resonant frequency		X0.55/Y0.52/Z8.7	kHz±20%
Closed/open-loop unloaded Step time		30/3	ms±20%
Load capacity		0.8	kg
Electrical capacitance		0.8/axis	μF±20%
Material
Mass		200	g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

Drawings（Click on the picture to enlarge it）

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