P13.XY50Z7 Piezo Stage, XYZ Direction, Stroke to 43µmCurrent Location:Product Homepage >> XYZ Piezo Nanopositioner>>P13.XY50Z7 Piezo Stage, XYZ Direction, Stroke to 43µm
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Characteristics


 XYZ motion

 XY stroke to 43μm/axis

 Z stroke to 8μm8

 closed loop sensor is optional

    Technical data

Models

 S-Closed loop

K-Open loop

P13.XY50Z7S
P13.XY50Z7K

Units

Active axes

XYZ

 

Drive control

3 driving channels 3 sensing channels

 

Travel range(0~120V)

X34/Y34/Z6

μm±10%

Max.travel range(0~150V)

X43/Y43/Z8

μm±10%

Integrated sensor

SGS/-

 

Closed/open loop resolution

XY1.5/0.5、

Z0.5/0.1

nm

Closed-loop linearity

0.2/-

%F.S.

Repeatability

0.1/-

%F.S.

Pitch/Yaw/Roll

-

μrad

Push/pull force capacity

-

N

Stiffness

 

N/μm±20%

Unloaded resonant frequency

X0.55/Y0.52/Z8.7

kHz±20%

Closed/open-loop unloaded Step time

30/3

ms±20%

Load capacity

Horizontal

0.8

kg

Vertical
0.02
Inverted
0.05

Electrical capacitance

0.8/axis

μF±20%

Material

 

 

Mass

200

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.


Mounting Method Horizontal Mounting
Vertical Mounting
Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

    Drawings(Click on the picture to enlarge it)

    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual

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