- Introduction
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Characteristics
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Applications
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| Technical Data | ||||
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Type |
S-Closed loop |
P66.XZ100Y30S |
P66.XZ100Y30K |
Units |
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Active axes |
X、Y、Z |
X、Y、Z |
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Drive control |
3 driving channels
3 sensing channels
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3 driving channels |
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Nominal travel range(0~120V) |
X100/Y28/Z85 |
X100/Y28/Z85 |
µm±10% |
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Max. travel range(0~150V) |
X125/Y35/Z105 |
X125/Y35/Z105 |
µm±10% |
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Sensor type |
SGS |
- |
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Resolution |
XZ4/Y1.2 |
XZ1.5/Y0.5 |
nm |
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Linearity |
X0.036/Y0.019/Z0.15 |
- |
%F.S. |
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Repeatability |
X0.017/Y0.022/Z0.165 |
- |
%F.S. |
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Pitch/yaw/roll |
XY＜5，Z＜25 |
XY＜5，Z＜25 |
μrad |
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Unloaded resonant frequency |
X270/Y475/Z560 |
X270/Y475/Z560 |
Hz±20% |
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Resonant frequency@300g(vertical mounting) |
X140/Y230/Z400 |
X140/Y230/Z400 |
Hz±20% |
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Load capacity
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Horizontal |
1 |
1 |
kg |
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Vertical |
0.5 | 0.5 | ||
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Inverted |
0.5 | 0.5 | ||
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Step time |
XZ40/Y10@300g |
XZ15/Y5 |
ms±20% |
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El.capacitance |
XY7/Z14 |
XY7/Z14 |
μF±20% |
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Operating temperature |
-20~65 |
-20~65 |
℃ |
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Material |
Stainless steel, aluminum alloy |
Stainless steel, aluminum alloy |
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| Mass | 800 | 800 |
g±5% |
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| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
