Characteristics

XYZ motion

XY stroke to 115μm/axis

Z stroke to 10μm

closed loop sensor is optional

Technical data
Models	S-Closed loop K-Open loop	P13.XY100Z10S P13.XY100Z10K	Units
Active axes		XYZ
Drive control		3 driving channels 3 sensing channels
Travel range(0~120V)		XY92/Z8	μm±10%
Max.travel range(0~150V)		XY115/Z10	μm±10%
Integrated sensor		SGS/-
Closed/open loop resolution		XY1.5/0.5, Z0.5/0.1	nm
Closed-loop linearity		X0.05/-, /Y0.02/-, Z0.3/-	%F.S.
Repeatability		X0.008/-, Y0.013/-, Z0.055/-	%F.S.
Unloaded resonant frequency		XY0.06/Z0.16@500g	kHz±20%
Closed/open-loop unloaded Step time		XY30@1μm, 500g/3 Z10@1μm, 500g/1	ms±20%
Load capacity	Horizontal	0.8	kg
	Vertical	0.8
	Inverted	0.8
Electrical capacitance		XY1.6/Z0.8	μF±20%
Material		Steel, Al
Mass		230	g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

Mounting Method	Horizontal Mounting	Vertical Mounting	Inverted Mounting
Definition	Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane. PS: Default direction for carrying capacity in the parameter table	Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity	Place the PZT platform horizontally, but the moving surface is located below the PZT platform
Diagram
Note	When the mounting method is selected as vertical mounting, pay attention to the outlet port

Drawings（Click on the picture to enlarge it）

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