P16.XY20Z7 can achieve ±12.5μm travel in XY-axis and 8.5μm travel in Z-axis. The product is very compact and easy to integrate.
Characteristics
Travel to ±12.5μm@XY,8.5μm@Z |
Load capacity 0.5kg |
Aperture:Ø26mm |
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Closed loop for high accuracy |
Optional vacuum version |
Open/closed loop |
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Custom is available |
Technical Data | |||
Type |
P16.XY20Z7K |
Units |
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Active axes |
X、Y |
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Driving channels |
4 driving channels |
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Nominal travel range(0~120V) |
XY±10/Z6.8 |
µm±10% |
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Travel range(0~150V) |
XY±12.5/Z8.5 |
µm±10% |
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Aperture |
Ø26 |
mm |
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Resolution |
XY0.3/Z0.2 |
nm |
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Pitch/yaw/roll |
<10 |
µrad |
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Unloaded resonant frequency |
XY1700/Z1400 |
Hz±20% |
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Unloaded step time |
XY0.2/Z0.4 |
ms±20% |
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Load capacity |
0.5 |
Kg |
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El. capacitance |
XY1.6/Z3.2 |
μF±20% |
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Material |
Steel, Al |
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Mass |
600 |
g±5% |
Note: Above parameters are measured with E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For high reliability and long-term use, the recommended driving voltage is 0~120V.
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