P16.XY20Z7 Piezo Scanner(Amplified Drive)Current Location:Product Homepage >> XYZ Piezo Nanopositioner>>P16.XY20Z7 Piezo Scanner(Amplified Drive)
 Piezo Scanner
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P16.XY20Z7 can achieve ±12.5μm travel in XY-axis and 8.5μm travel in Z-axis. The product is very compact and easy to integrate.


Characteristics


 Travel to ±12.5μm@XY,8.5μm@Z

 Load capacity 0.5kg

 Aperture:Ø26mm


 Closed loop for high accuracy

 Optional vacuum version

 Open/closed loop


 Custom is available

    Technical Data

Type

P16.XY20Z7K

Units

  Active axes 

XY

 

  Driving channels

4 driving channels

  Nominal travel range(0~120V)

XY±10/Z6.8

µm±10%

  Travel range(0~150V)

XY±12.5/Z8.5

µm±10%

  Aperture

Ø26

mm

  Resolution

XY0.3/Z0.2

nm

  Pitch/yaw/roll

<10

µrad

  Unloaded resonant frequency

XY1700/Z1400

Hz±20%

  Unloaded step time

XY0.2/Z0.4

ms±20%

  Load capacity

0.5

Kg

  El. capacitance

XY1.6/Z3.2

μF±20%

  Material

Steel, Al

 

  Mass

600

g±5%

Note: Above parameters are measured with E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For high reliability and long-term use, the recommended driving voltage is 0~120V.

     Drawings(Click on the picture to enlarge it)
Click on the picture to enlarge it
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual



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