P11.XY200 Piezo Nanopositioning StageCurrent Location:Product Homepage >> XY/XZ Nanopositioner>>P11.XY200 Piezo Nanopositioning Stage
P11.XY200 Piezo Nanopositioning Stage
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P11.XY200 is a small-volume 2 axis piezo nanopositioning stage, its travel range can reach 200μm, and a closed-loop feedback sensor can be selected to obtain higher precision. Custom low temperature vacuum versions are available.

Characteristics


 Stroke to 200μm

 Small size

 Fast response time

 Vacuum version available


Typical Application


 Nanopositioning

 Quality assurance test

 Micromachining / precision control

 Biotechnology

 Quick Scan




    Technical Data

Type

P11.XY200S
P11.XY200K

Units

Active axes

X、Y X、Y

 

Drive control

2 driving channels 2 sensing channels 2 driving channels

 

Travel range(0~120V)

160/axis
160/axis

μm±20%

Max.travel range(0~150V)

200/axis
200/axis

μm±20%

Sensor

SGS
-

 

Closed/open loop resolution

10
5

nm

Linearity

0.05
-

%F.S.

Repeatability

0.02
-

%F.S.

Unloaded resonant frequency

100
100

Hz±20%

Closed/open-loop unloaded step time

-
-

ms±20%

Load capacity

Horizontal
0.3
0.3

kg

Vertical    
0.03 0.03
Inverted
0.3 0.3

El. capacitance

3.6
3.6

μF±20%

Material

Steel, Aluminum
Steel, Aluminum


Mass

-
-

g±5%


Mounting Method Horizontal Mounting
Vertical Mounting
Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

    Drawing(Click on the picture to enlarge it)
Click on the picture to enlarge it
     Downloads
Auto CAD PDF

Step
Specs Sheet
Manual


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