P11.XZ400 is a piezo nanopositioning stage moving in X and Z, which adopts a frictionless flexible hinge guide mechanism. Mechanism amplification driving principle and built-in high-performance piezo material make it achieve 430μm/axis displacement. The closed-loop version of the full bridge design avoids temperature drift significantly and ensures nanometer level positioning accuracy.
Characteristics
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Typical Applications
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Technical Data | ||||
Type |
S-Closed loop
K-Open loop
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P11.XY400S |
P11.XY400K |
Units |
Active axes |
X、Z |
X、Z |
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Drive control |
2 driving channels 2 sensing channels |
2 driving channels |
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Nominal travel range(0~120V) |
345/axis |
345/axis |
μm±10% |
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Max. travel range(0~150V) |
430/axis |
430/axis |
μm±10% |
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Sensor type |
SGS |
- |
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Resolution |
15 | 5 |
nm |
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Linearity |
0.14/0.07 |
- |
%F.S. |
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Repeatability |
0.025 |
- |
%F.S. |
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Unloaded resonant frequency |
X155/Z135 |
X155/Z135 |
Hz±20% |
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Resonant frequency@600g |
85 |
85 |
Hz±20% |
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Step time |
50@600g |
15 |
ms±20% |
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Load capacity |
Horizontal |
600 |
600 |
g |
Vertical | 20 | 20 | ||
Inverted | 20 | 20 | ||
El.capacitance |
20.4/axis |
20.4/axis |
μF±20% |
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Operating temperature |
-20~65 |
-20~65 |
℃ |
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Material |
Stainless steel, aluminum alloy |
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Mass |
1045 |
1045 |
g±5% |
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Cable length |
2 |
2 |
m±10mm |
Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
Diagram |
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Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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