- Introduction
- Feedback
P63.XZ is XZ-axis moving piezoelectric nano-positioning stage. It adopts the design principle of piezoelectric stack direct-drive mechanism and could achieve nano-level resolution and positioning accuracy, has very high reliability, and plays an important role in the field of precision positioning.
Characteristics
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Appearance 
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Moving-part 
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Direct-driving 
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Small Size Quick Response
P63 piezoelectric nano positioning stage is characterized by high precision and small size. The size of the P63.X is only 30×30×21mm (XYZ axis is 30×30×42mm), which is very easy to integrate into the scanning instrument. |
Sensor 
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Application case P63.XYZ has been applied to the cutting force test based on SEM online nano cutting stage. 
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Applications
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| Technical Data | ||||
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Models |
S-Closed loop
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P63.XZ7S |
P63.XZ7K |
Units |
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Active axes |
X,Z |
X,Z |
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Drive control |
2 driving channels 2 sensing channels |
2 driving channels |
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Travel range(0~120V) |
5.5/axis |
5.5/axis |
μm±10% |
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Max.travel range(0~150V) |
6.8/axis |
6.8/axis |
μm±10% |
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Integrated sensor |
SGS |
- |
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Closed/open loop resolution |
0.2 |
0.1 |
nm |
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Closed-loop linearity |
0.4 |
- |
%F.S. |
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Repeatability |
0.2 |
- |
%F.S. |
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Pitch/Yaw/Roll |
<10 |
<10 |
μrad |
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Push/pull force capacity |
9/2 |
9/2 |
N |
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Stiffness |
X1.2/Z1.5 |
X1.2/Z1.5 |
N/μm±20% |
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Unloaded resonant frequency |
X1.5/Z1.6 |
X1.5/Z1.6 |
kHz±20% |
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Closed/open-loop unloaded |
1.5 |
0.3 |
ms±20% |
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Load capacity |
Horizontal |
0.5 |
0.5 |
kg |
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Vertical |
0.05* | 0.05* | ||
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Inverted |
0.05 | 0.05 | ||
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Electrical capacitance |
0.8/axis |
0.8/axis |
μF±20% |
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Material |
AI |
AI |
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Mass |
120 |
120 |
g±5% |
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Note:When installed vertically, the load capacity depends on the specific installation direction.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
