- Introduction
- Feedback
Piezo nanopositioning stage plays an important role in the field of precision positioning. It can be integrated into all kinds of high precision equipment to provide nanoscale motion control, and is widely used.
The XD770.300 series piezo stage moves in Z, can reach 300μm travel, and the load capacity can reach 5kg. It can realize the double improvement of the travel range and load capacity, providing a high-quality solution for the applications that need of large travel and large load at the same time. With CoreMorrow’s piezo controller, high resolution, fast response.
Characteristics
|
|
|
|
|
|
|
|
|
|
Applications
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
| Technical Data | ||||
|
Type |
XD770.300S |
XD770.300S |
Units |
|
|
Active axes |
Z |
Z |
|
|
|
Drive control |
1 driving channel， |
1 driving channel |
|
|
|
Nominal travel range（0~120V) |
240 |
240 |
μm±10% |
|
|
Max.travel range（0~150V） |
300 |
300 |
μm±10% |
|
|
Sensor |
SGS |
- |
|
|
|
Resolution |
10 |
3 |
nm |
|
|
Linearity |
0.08 |
- |
%F.S. |
|
|
Repeatability |
0.02 |
- |
%F.S. |
|
|
Pitch/yaw/roll |
＜ 15 |
＜ 15 |
μrad |
|
|
Unloaded resonant frequency |
380 |
380 |
μF±20% |
|
|
Resonant frequency |
110@5kg |
110@5kg |
Hz±20% |
|
|
Unloaded step time |
300/10 |
300/10 |
ms±20% |
|
|
Load capacity |
Horizontal |
5 |
5 |
kg |
|
Vertical |
0.08 | 0.08 | ||
|
Inverted |
0.4 | 0.4 | ||
|
El. capacitance |
40.8 |
40.8 |
μF±20% |
|
|
Operating temperature |
-20~80 |
-20~80 |
℃ |
|
|
Material |
Steel, Aluminum |
Steel, Aluminum |
|
|
|
Mass（no cable) |
1 |
1 |
kg±5% |
|
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
|
Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
|
Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
 |
 |
 |
| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
||
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
