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Piezo Nanopositioning Stage
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    Technical Data
Type P13.XYZ180K Units
 Active axes  X、Y、Z
 Travel in 300K(0~60V) 180 μm±20%
 Travel in 4K(0~150V) 80 μm±20%
 Resolution 5 nm
 Load capacity 100 g
 Unloaded resonant frequency
 		100 Hz±20% 
 Mass (not include cable) 300 g±5%
 El. capacitance 12.3/axis μF±20%
    Drawings（Click on the picture to enlarge it）
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    Technical Data
 Type 20059 Units
 Active axes  Z
 Travel range(0~120V) 800 μm±20%
 Travel range(0~150V) 1000 μm±20%
 Sensor CAP capacitance
 Closed-loop resolution 27 nm(Under 5mV ripple) 
 Open-loop resolution 8 nm
 Linearity 0.1 %F.S.±20%
 Repeatability 0.02 %F.S.±20%
 Load capacity 700 g
 El. capacitance 58 μF±20%
    Drawings（Click on the picture to enlarge it）
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    Technical Data
 Type 20090 Units
 Active axes X Y
 Travel range 30 μm/axis ±20%
 Driving voltage 0~150 V
 Resonant frequency@2kg load 180 Hz±20%
 El. capacitance 14.5 μF/ axis ±20%
 Load capacity 2 kg
 Materials aluminum
 Mass (not include cable) 5.3 kg±5%
    Drawings（Click on the picture to enlarge it）
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    Technical Data
Type 20100 Units
 Active axes X Y Z
 XY Travel range(0~150V) 400 μm/axis ±20%
 Z Travel range(0~150V) 100 μm±20％
 X, Y capacitance 10.8 μF/ axis ±20％
 Z capacitance 3.6 μF±20％
    Drawings（Click on the picture to enlarge it）
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    Technical Data
 Type 20136-100μm Units
 Active axes X Z
 Travel range in X ±50 μm±20%
 Travel range in Z 100 μm±20%
 Driving voltage 0~150 V
 Sensor SGS
 Load capacity 10 kg
    Drawings（Click on the picture to enlarge it）
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    Technical Data
 Type 21001 Units
 Active axes X、Y、Z
 Travel range(0~150V) 20/axis μm±20%
 Sensor SGS
 Open-loop resolution 1 nm
 Resolution 20 %F.S.
 El. capacitance 13.2/ axis μF±20%
 Load capacity 5 kg
 Materia Steel, Aluminum
    Drawings（Click on the picture to enlarge it）
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    Technical Data
 Type 21009 Units
 Active axes X、Z
 Norminal travel(0~150V) 200/axis μm±20%
 Sensor SGS
 Size 150×150×39 mm
 Closed/open resolution 20/10 nm
 Linearity 0.25 %F.S.±20%
 Repeatability 0.15 %F.S.±20%
 Pitch/yaw/roll <60 μrad±20%
 Unloaded resonant frequency 250 Hz±20%
 Resonance @3kg load 70 Hz±20%
 Operating frequency @3kg load 5 Hz
 Step time @3kg load 80 ms±20%
 Load capacity 3 kg
 El.capacitance 21.6/28.8 μF±20%
 Material Steel, Aluminum
    Drawings（Click on the picture to enlarge it）
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    Technical Data
 Type 21136 Units
 Active axes X
 Travel range(0~120V) ±40 μm±20%
 Travel range(0~150V) ±50 μm±20%
 Sensor SGS
 Closed-loop resolution 0.1 %F.S.±20%
 Repeatability 0.05 %F.S.±20%
 Operating temperature 0~+80 ℃
 Load capacity(Lateral) 2 kg
 El. capacitance 7.2 μF±20%
 Material Steel, Aluminum
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
Type 21147 Units
 Active axes X Y Z
 Norminal travel(0~120V) 400/axis μm±20%
 Travel range(0~150V) 500/axis μm±20%
 Sensor SGS
 Resolution 0.3 %F.S.±20%
 Linearity 0.15 %F.S.±20%
 Repeatability 70@20mV ripple nm
 Load capacity 100 g
 El.capacitance 21.6/axis μF±20%
 Material Steel, Aluminum
    Drawings（Click on the picture to enlarge it）
Click on the picture to enlarge it
    Technical Data
 Type 21210 Units
 Active axes X
 Travel range(0~150V) 250 μm±20%
 Sensor SGS，high accuracy
 Unloaded resonant frequency
 		260 Hz±20%
 Closed-loop resolution
 		42@20mV nm
 Load capacity 0.3 kg
 El.capacitance 7.2 μF±20%
 Material Steel, Aluminum
    Drawings（Click on the picture to enlarge it）
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    Technical Data
Type 22025 Units
 Active axis Z
 Nominal travel(0~120V) 80 μm±20%
 Travel(0~150V) 100
 		μm±20%
 Sensor  SGS
 Unloaded resonant frequency 680 Hz±20%
 Open/closed-loop resolution 1/4 nm±20%
 Resonant frequency @ 5kg load 80 Hz±20%
 Linearity 0.2 %F.S.
 Repeatability 0.1 %F.S.
 Mass(no cable) <0.6 kg±5%
 Load capacity 5 kg
 El.capacitance 21.6 μF±20%
 Material  Steel, Al
    Drawings（Click on the picture to enlarge it）
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