- Introduction
- Feedback
XD611.Z300 piezo nanopositioning stage moves in Z, its travel is up to 300μm, and it's designed for the applications in cryo and vacuum environment.
Characteristics
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XD611.Z300S/K 
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Applications
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| Technical Data | ||||
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Type |
XD611.Z300S |
XD611.Z300K |
Units |
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Active axes |
Z |
Z |
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Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
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Nominal travel(0~120V) |
240 |
240 |
µm±20% |
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Max.travel(0~150V) |
300 |
300 |
µm±20% |
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Unloaded resonant frequency |
105 |
105 |
Hz±20% |
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Loaded resonant frequency |
30（@300g） |
30（@300g） |
Hz±20% |
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Sensor |
SGS |
- |
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Resolution |
10 |
3 |
nm |
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Linearity |
0.5 |
- |
%F.S. |
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Repeatability |
0.15 |
- |
%F.S. |
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El.capacitance |
5.4 |
5.4 |
μF±20% |
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Load capacity |
Horizontal |
0.3 |
0.3 |
kg |
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Vertical |
0.02 | 0.02 | ||
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Inverted |
0.02 | 0.02 | ||
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Material |
Ti |
Ti |
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Note: Max driving voltage could be -20V~150V, recommended voltage 0~120V for long-term and high-reliable operation to extend lifetime. Technical data is measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
