XD611.Z300 Piezo Nanopositioning Stage(Cryo-Vacuum)Current Location:Product Homepage >> X/Z Piezo Nanopositioner>>XD611.Z300 Piezo Nanopositioning Stage(Cryo-Vacuum)
XD611.Z300 Piezo Nanopositioning Stage
  • Introduction
  • Feedback

XD611.Z300 piezo nanopositioning stage moves in Z, its travel is up to 300μm, and it's designed for the applications in cryo and vacuum environment.


Characteristics


 Motion in Z

 Travel up to 300μm

 Suitable for cryo and vacuum environment

 Closed-loop version for high accuracy


XD611.Z300S/K


Applications


 Surface inspection

 Microscopy imaging

 Cyro and vacuum application 

 Semiconductor processing and test

    Technical Data

Type

XD611.Z300S

XD611.Z300K

Units

Active axes

Z

Z

 

Drive control

3 driving channels 3 sensing channels

3 driving channels

 

Nominal travel(0~120V)

240

240

µm±20%

Travel(0~150V)

300

300

µm±20%

Unloaded resonant frequency

105

105

Hz±20% 

Loaded resonant frequency

30(@300g)

30(@300g)

Hz±20%

Sensor

SGS

-


Resolution

10

3

nm

Linearity

0.5

-

%F.S.

Repeatability

0.15

-

%F.S.

El.capacitance

5.4

5.4

μF±20%

Load capacity

300

300

g

Material

Ti

Ti


Note: Max driving voltage could be -20V~150V, recommended voltage 0~120V for long-term and high-reliable operation to extend lifetime. Technical data is measured by CoreMorrow E00/E01 series piezo controller.

    Drawing(Click on the picture to enlarge it)
Click on the picture to enlarge it
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual

     3D diagram presentation

  • Client:
    Distributor End User
  • Customer type:
    Corporation University Institute
  • Name of your Company/organication:
  • Company Location:
  • Your Contact Information:
  • Your Name:
  • Phone Number:
  • Tel:
  • E-mail:
  • Postcode:
  • (Please make sure you have given the authentic and effective contact info for us to feedback.)
  • Products:
  • Model:
  • Problem:
    Performance Appearance Software Accessories/Parts
  • Description of the Feedback:
  • auth code: Can't see clearly?

WeChat

Sweep, get the latest information on core tomorrow

Address:1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China

Tel:0451-86268790

Piezo · Nano · Motion

Copyright@ CoreMorrow Ltd. 黑ICP备16009173号-1