Type 

P60.Z1000S-C1

P60.Z1000K-C1

Units

Active axes

Z

Z

Drive control

1 driving channel 1 sensing channel

1 driving channel 1 sensing channel

Travel range(0~120V)

800

800

µm±10%

Travel range(0~150V)

1000

1000

µm±10%

Sensor

SGS

-

Resolution

35

10

nm

Linearity

0.2

-

%F.S.

Repeatability

0.1

-

%F.S.

Unloaded resonant frequency

80

-

Hz±20%

Load capacity

1.5

1.5

Hz±20%

El. capacitance

72

72

μF±20%

Material

Titanium, aluminum

Titanium, aluminum

Mass(with no cable)

<1.3

<1.3

kg±20%

Vacuum

-

-

mbar