- Introduction
- Feedback
P11.X/Z200 is a small-volume 1 axis piezo nanopositioning stage, its travel range can reach 200μm, the movement direction can be chosen X direction or Z direction, and a closed-loop feedback sensor can be selected to obtain higher precision. Custom low temperature vacuum versions are available.
Characteristics
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| Technical Data | |||||
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Type |
P11.X200S |
P11.X200K |
P11.Z200S |
P11.Z200K |
Units |
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Active axes |
X |
X |
Z |
Z |
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Drive control |
1 driving channel |
1 driving channel | 1 driving channel 1 sensing channel | 1 driving channel |
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Travel range(0~120V) |
160 |
160 |
160 |
160 |
μm±20% |
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Travel range(0~150V)） |
200 |
200 |
200 |
200 |
μm±20% |
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Sensor |
SGS |
- |
SGS |
- |
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Closed/open loop resolution |
10 |
4 |
5.5 |
2 |
nm |
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Linearity |
0.05 |
- |
0.15 |
- |
%F.S. |
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Repeatability |
0.02 |
- |
0.06 |
- |
%F.S. |
|
Pitch/yaw/roll |
<20 |
<20 |
<10 |
<10 |
μrad |
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Push/pull force |
- |
- |
70/6 |
70/6 |
N |
|
Vacuum compatible |
10^-4 |
10^-4 |
- |
- |
Pa |
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Stiffness |
- |
- |
0.45 |
0.45 |
N/μm±20% |
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Unloaded resonant frequency |
0.3 |
0.3 |
0.18 |
0.18 |
kHz±20% |
|
Closed/open-loop unloaded step time |
20 |
0.8 |
10 |
0.8 |
ms±20% |
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Load capacity |
0.5 |
0.5 |
0.5 |
0.5 |
kg |
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El. capacitance |
3.6 |
3.6 |
3.6 |
3.6 |
μF±20% |
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Material |
Steel, Aluminum |
Steel, Aluminum |
Steel, Aluminum |
Steel, Aluminum |
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Mass |
- |
- |
170 |
170 |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
