P66.X30S/K-C1 Piezo Nanopositioning StageCurrent Location:Product Homepage >> X/Z Piezo Nanopositioner>>P66.X30S/K-C1 Piezo Nanopositioning Stage
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Characteristics


 Motion in X

 Travel to 38μm 

  Load capacity to 100g

 Closed-loop or UHV version available 


Typical Applications


 Scanning microscopy 

 Micromanipulation

  Nano positioning/measurement

 Micromachining

    Technical Data

Types

P66.X30S-C1

P66.X30K-C1

Units

Active axes

X

X

Nominal travel range(0~120V)

30

30

µm±10%

Travel range(0~150V)

38

38

µm±10%

Sensor type

SGS

-

Resolution

1

0.5

nm

Linearity

0.1

-

%F.S.

Repeatability

0.1

-

%F.S.

Push/pull force

200/10

200/10

N

Stiffness in motion direction

10

10

N/μm

Unloaded resonant frequency

2000

2000

Hz±20%

Step time

5

1.5

ms±20%

Load capacity

100

100

g

El.capacitance 

3.6

3.6

μF±10%

Material

Al

Al

Cable length

1.5

1.5

m±10mm

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