Characteristics

Motion in X

Travel to 38μm

Load capacity to 100g

Closed-loop or UHV version available

Typical Applications

Scanning microscopy

Micromanipulation

Nano positioning/measurement

Micromachining

Technical Data
Types		P66.X30S-C	P66.X30K-C	Units
Active axes		X	X
Drive control		1 driving channel 1 sensing channel	1 driving channel
Nominal travel range（0~120V）		30	30	µm±10%
Max.travel range（0~150V）		38	38	µm±10%
Sensor type		SGS	-
Resolution		1	0.5	nm
Linearity		0.1	-	%F.S.
Repeatability		0.1	-	%F.S.
Push/pull force		200/10	200/10	N
Stiffness in motion direction		10	10	N/μm
Unloaded resonant frequency		2000	2000	Hz±20%
Step time		5	1.5	ms±20%
Load capacity	Horizontal	1	1	kg
	Vertical	0.3	0.3
	Inverted	1	1
El.capacitance		3.6	3.6	μF±10%
Material		Al	Al
Cable length		1.5	1.5	m±10mm
Mass		193	193	g±5%

Mounting Method	Horizontal Mounting	Vertical Mounting	Inverted Mounting
Definition	Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane. PS: Default direction for carrying capacity in the parameter table	Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity	Place the PZT platform horizontally, but the moving surface is located below the PZT platform
Diagram
Note	When the mounting method is selected as vertical mounting, pay attention to the outlet port

Drawings（Click on the picture to enlarge it）

3D diagram presentation

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