Characteristics

Motion in X

Travel to 38μm

Load capacity to 100g

Closed-loop or UHV version available

Typical Applications

Scanning microscopy

Micromanipulation

Nano positioning/measurement

Micromachining

Technical Data
Types	P66.X30S-C1	P66.X30K-C1	Units
Active axes	X	X
Drive control	1 driving channel 1 sensing channel	1 driving channel
Nominal travel range（0~120V）	30	30	µm±10%
Travel range（0~150V）	38	38	µm±10%
Sensor type	SGS	-
Resolution	1	0.5	nm
Linearity	0.1	-	%F.S.
Repeatability	0.1	-	%F.S.
Push/pull force	200/10	200/10	N
Stiffness in motion direction	10	10	N/μm
Unloaded resonant frequency	2000	2000	Hz±20%
Step time	5	1.5	ms±20%
Load capacity	100	100	g
El.capacitance	3.6	3.6	μF±10%
Material	Al	Al
Cable length	1.5	1.5	m±10mm
Mass	193	193	g±5%

Drawings（Click on the picture to enlarge it）

3D diagram presentation

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