- Introduction
- Feedback
P66.X15 high-resolution piezo nanopositioning stage is a X-direction motion piezo platform, which adopts a direct drive mechanism internally and can perform nanoscale position adjustment within a range of 20μm. There are three installation methods available: horizontal, vertical, and inverted. Each installation has a different load capacity, with a maximum load capacity of 1kg. The closed-loop version is for higher positioning accuracy.
Characteristics
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 Parameters customizable
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Vacuum is available
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Recommended Controllers  E53.D1S-H
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| Technical Data | ||||
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Type |
S-Closed loop
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P66.X15S |
P66.X15K |
Units |
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Active axes |
X |
X |
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Drive control |
1 driving channel |
1 driving channel |
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Nominal travel range(0~120V) |
16 |
16 |
μm±10% |
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Max. travel range(0~150V) |
20 |
20 |
μm±10% |
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Sensor type |
SGS | - |
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Resolution |
1 |
0.5 |
nm |
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Linearity |
0.16 |
- |
%F.S. |
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Repeatability |
0.03 |
- |
%F.S. |
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Push/pull force |
500/20 |
500/20 |
N |
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Stiffness |
28.8 |
28.8 |
N/μm±20% |
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Unloaded resonant frequency |
4350 |
4350 |
Hz±20% |
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Resonant frequency@300g |
1070 |
1070 |
Hz±20% |
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Load capacity |
Horizontal |
1 |
1 |
kg |
| Vertical | 0.5 | 0.5 | ||
| Inverted | 1 | 1 | ||
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Step time |
8@300g |
2 |
ms±20% |
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El.capacitance |
3.2 |
3.2 |
μF±20% |
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Material |
Steel, Al |
Steel, Al |
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Mass(Cable included) |
265 |
265 |
g±5% |
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| Connector |
PZT: J14A-9TJL
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PZT: J14A-9TJL |
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| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
