- Introduction
- Feedback
To meet the needs of customers for the use of piezo nanopositioning stage in vacuum non-magnetic environments, CoreMorrow has developed and designed the P60.Z500S/K-C Z-axis piezo nanopositioning stage. It adopts a frictionless flexible hinge guide mechanism and an integrated structural design internally. The positioning platform is equipped with high-performance piezoelectric actuator, which can achieve a displacement of 500 μm. The closed-loop version with the full bridge design avoids temperature drift and ensures nanometer level positioning accuracy. Its structure adopts special material and has undergone special treatment, which makes it suitable for vacuum non-magnetic environments.
Characteristics
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Application
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Loaded Step Time 
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| Technical Data | ||||
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Type |
S-Closed loop
K-Open loop |
P60.Z500S-C |
P60.Z500K-C |
Units |
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Active axes |
Z |
Z |
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Drive control |
1 driving channel |
1 driving channel |
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Nominal travel range(0~120V) |
400 |
400 |
µm±10% |
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Max. travel range(0~150V) |
500 |
500 |
µm±10% |
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Sensor type |
SGS |
- |
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Resolution |
13.5 |
4 |
nm |
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Linearity |
0.078 |
- |
%F.S. |
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Repeatability |
0.03 |
- |
%F.S. |
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Unloaded resonant frequency |
260 |
260 |
Hz±20% |
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Resonant frequency@1100g |
120 |
120 |
Hz±20% |
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Load capacity |
Horizontal |
5 |
5 |
kg |
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Vertical |
3 |
3 |
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Inverted |
5 |
5 |
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Step time |
120@1100g，30μm | 10 |
ms±20% |
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El.capacitance |
58.5 |
58.5 |
μF±20% |
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Operating temperature |
-20~65 |
-20~65 |
℃ |
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| Material |
Ti, Al |
Ti, Al |
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Mass |
950 | 950 |
g±5% |
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Vacuum compatibility |
1×10^(-6) |
1×10^(-6) |
mbar |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
