P66.X2K Piezo Nanopositioning Stage((Direct Drive))Current Location:Product Homepage >> X/Z Piezo Nanopositioner>>P66.X2K Piezo Nanopositioning Stage((Direct Drive))
  • Introduction
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        P66.X2K is a X-axis vacuum piezo nanopositioning stage from CoreMorrow. This product adopts a direct drive structure and can achieve a maximum displacement of 2.4μm in the X-axis, with a load capacity of up to 1kg. It measures 70mm×85mm×20.5mm and has a very compact size, suitable for the applications with limited spaces. It has a customized connectors which makes it to be used in a vacuum environment.



  Characteristics


 X motion

 Resolution to 0.5nm

 Load capacity to 1kg

Unloaded resonant frequency to 12kHz

 Millisecond response time

 Customized connector

 Vacuum version







Applications


 Interference microscopy

Scanning

 Optical measurement

 Micro machining

 Precision control measurement



    Technical Data

Type

P66.X2K

Units

Active axes

X

 

Drive control

1 driving channel

 

Nominal travel range(0~120V)

1.9

μm±10%

Max.travel range(0~150V)

2.4

μm±10%

Resolution

0.5

nm

Unloaded resonant frequency

12

kHz±20%

Resonant frequency@20g


10

kHz±20%

Unloaded step time

2

ms±20%

Load capacity

Horizontal

1

kg

Vertical
1
Inverted
1

El. capacitance

0.58

μF±20%

Operating temperature

-20~80

Material

Stainless steel, aluminum alloy


Mass(no cable)

310

g±5%



Mounting Method Horizontal Mounting
Vertical Mounting
Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

    Drawing(Click on the picture to enlarge it)
Click on the picture to enlarge it
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual


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