- Introduction
- Feedback
P60.X200 piezo nanopositioning stage adopts amplification mechanism, flexible hinge design and high-reliability piezo actuator to realize displacement of X-axis up to 200μm, and could be configured with closed-loop sensor for high-precision scanning and positioning. It could realize 2 or 3 axes motion by combining multiple stages.
Characteristics
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Loaded Step Time 
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| Technical Data | ||||
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Type |
S-Closed loop
K-Open loop
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P60.X200S |
P60.X200K |
Units |
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Active axes |
X |
X |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
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Driving channels |
2 |
2 |
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Nominal travel range(0~120V) |
160 |
160 |
μm±10% |
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Max.travel range(0~150V) |
200 |
200 |
μm±10% |
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Sensor type |
SGS |
- |
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Resolution |
7 |
2 |
nm |
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Linearity |
0.02 |
- |
%F.S. |
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Repeatability |
0.01 |
- |
%F.S. |
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Pitch/yaw/roll |
<15 |
<15 |
μrad |
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Step time |
50@20μm, 1300g |
30 |
ms±20% |
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Unloaded resonant frequency |
370 |
370 |
Hz±20% |
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Resonant frequency@1300g |
120 |
120 |
Hz±20% |
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El.capacitance |
10.8 | 10.8 |
μF±20% |
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Operating temperature |
-20~80 |
-20~80 |
℃ |
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Load capacity |
Horizontal |
5 |
5 |
kg |
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Vertical |
3 | 3 | ||
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Inverted |
5 | 5 | ||
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Material |
Stainless steel, aluminum alloy |
Stainless steel, aluminum alloy |
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Mass |
630 |
630 |
g±5% |
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| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Tel：0451-86268790
Piezo · Nano · Motion
