- Introduction
- Feedback
XD108 is a customized version of X-axis piezo nanopositioning scanner, with two ranges available: 30μm and 37μm. It adopts a no-friction flexible hinge guiding mechanism and integrated structural design. It is equipped with high-performance piezo actuators to ensure 37μm displacement.
Characteristics
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Applications
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| Technical Data | |||
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Type |
XD108.30S
XD108.30K |
XD108.40S
XD108.40K |
Units |
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Active axes |
X |
X |
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Drive control |
1 driving channel |
1 driving channel |
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Nominal travel range(0~120V) |
24 |
30 |
µm±10% |
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Travel range(0~150V) |
30 |
37 |
µm±10% |
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Sensor type |
SGS/- |
SGS/- |
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Resolution |
1/0.3 |
2/0.4 |
nm |
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Linearity |
0.302/- |
0.03/- |
%F.S. |
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Repeatability |
0.021/- |
0.01/- |
%F.S. |
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Unloaded resonant frequency |
3300 |
2200 |
Hz±20% |
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Loaded resonant frequency |
1200@17kg |
1000@74g |
Hz±20% |
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Load capacity |
100 |
100 |
g |
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Step time |
5@17g/1 |
5@74g/1 |
ms±20% |
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El. Capacitance |
2.5 |
3.6 |
μF±20% |
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Material |
Al, Steel |
Al, Steel |
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Mass |
600 |
620 |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
