XD110.Z50 piezo scanner moves in Z, its travel is up to 200μm. It has a large square aperture, and is ideal for sample microscopy imaging applications.
Characteristics
Z motion |
Load capacity to 5kg |
Nanoscale resolution |
Travel up to 50μm |
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Technical Data | |||
Type |
XD110.Z50S |
XD110.Z50K |
Units |
Active axes |
Z |
Z |
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Drive control |
1 driving channel |
1 driving channel |
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Nominal travel range(0~120V) |
40 |
40 |
µm±10% |
Travel range(0~150V) |
50 |
50 |
µm±10% |
Sensor type |
SGS |
- |
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Resolution |
2 |
0.5 |
nm |
Linearity |
0.27 |
- |
%F.S. |
Repeatability |
0.023 |
- |
%F.S. |
Unloaded resonant frequency |
370 |
370 |
Hz±20% |
Resonant frequency@5kg |
100 |
100 |
Hz±20% |
Load capacity |
5 |
5 |
kg |
Step time |
60@5kg |
10 |
ms±20% |
El. Capacitance |
5.6 |
5.6 |
μF±20% |
Material |
Al, Steel |
Al, Steel |
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Mass |
1.1 |
1.1 |
kg±5% |
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